"Trust" "Chamber" "Material" "LogbookId" "Rate, nm/sec" "Time, sec" "Thickness, nm" "Normalized Rate, nm/W*sec" "Power, W" "Power Supply" "Cathode" "Pressure, mTorr" "Argon Flow, sccm" "Working Distance Table Height, mm" "Comment" "Working Distance Cathode Tilt, mm" "1" "1" "Ag" "061228-K1-3" "0.0950556" "1800" "171.1" "0.000950556" "100" "RF" "6" "5" "60" "132" "Book 3: April 2006-Jan 2007" "" "0" "1" "Ag" "061229-K1-1" "0.348483" "1800" "627.27" "0.00174242" "200" "RF" "6" "5" "60" "132" "Book 3: April 2006-Jan 2007" "" "0" "1" "Al" "080319-K1-1" "0.145" "1800" "261" "0.000725" "200" "RF" "6" "5" "60" "138.9" "" "" "0" "1" "Al" "080424-K1-2" "0.056" "2700" "151.2" "0.000373333" "150" "RF" "5" "5" "60" "138.9" "" "" "0" "1" "Al" "080516-K1-3" "0.0210741" "2700" "56.9" "0.000351235" "60" "RF" "5" "5" "60" "138.9" "Book 6: March 2008-April 2009" "" "0" "1" "Al" "080519-K1-2" "0.0142083" "12000" "170.5" "0.000236806" "60" "RF" "5" "5" "60" "138.9" "Book 6: March 2008-April 2009" "" "0" "1" "Al" "080529-K1-1" "0.0471111" "5400" "254.4" "0.000336508" "140" "RF" "5" "5" "60" "138.9" "Book 6: March 2008-April 2009" "" "0" "1" "Al" "100228-K1-1" "0.058" "2700" "156.6" "0.000386667" "150" "RF" "5" "5" "60" "136.4" "" "" "0" "1" "Al" "100315-K1-1" "0.095" "2700" "256.5" "0.00038" "250" "RF" "5" "5" "60" "136.4" "Book 8: April 2009-April 2010" "" "0" "1" "Al" "100316-K1-1" "0.056" "2700" "151.2" "0.000224" "250" "RF" "5" "20" "90" "136.4" "Book 8: April 2009-April 2010" "" "0" "1" "Al" "100408-K1-1" "0.43" "2700" "1161" "0.00215" "200" "DC" "2" "2" "40" "136.4" "Book 8: April 2009-April 2010" "" "0" "1" "Al" "100423-K1-1" "0.0623889" "1800" "112.3" "0.00124778" "50" "DC" "3" "5" "60" "134.4" "Book 8: April 2009-April 2010" "" "0" "1" "Al" "100714-K1-2" "0.386709" "3160" "1222" "0.00193354" "200" "" "3" "5" "60" "136.4" "Book 10: April 2010-Jan 2011" "" "0" "1" "Al" "100809-K1-1" "0.073" "3600" "262.8" "0.000292" "250" "RF" "5" "5" "60" "136.4" "Book 10: April 2010-Jan 2011" "" "0" "1" "Al" "110228-K1-1" "0.084" "300" "25.2" "0.000336" "250" "RF" "6" "5" "100" "136.4" "Book aktuell: Jan 2011- now" "" "0" "1" "Al" "110316-K1-2" "0.012" "1800" "21.6" "0.00024" "50" "RF" "6" "15" "100" "185" "Book aktuell: Jan 2011- now" "" "0" "1" "Al" "110325-K1-2" "0.0188" "900" "16.92" "0.000376" "50" "RF" "6" "5" "60" "185" "Book aktuell: Jan 2011- now" "" "0" "1" "Al" "110815-K1-2" "0.391667" "1800" "705" "0.00195833" "200" "DC" "1" "5" "60" "136.4" "Book aktuell: Jan 2011- now" "" "1" "1" "Al" "120403-K1-1" "0.906667" "900" "816" "0.00453333" "200" "DC" "3" "2" "40" "" "" "" "0" "1" "Al" "120404-K1-2" "0.33" "500" "165" "0.0033" "100" "DC" "3" "2" "40" "" "" "" "0" "1" "Al" "120404-K1-4" "0.254" "500" "127" "0.003175" "80" "DC" "3" "2" "40" "" "" "" "0" "1" "Al" "120405-K1-1" "0.104167" "1200" "125" "0.00260417" "40" "DC" "3" "2" "40" "" "" "" "0" "1" "Al" "150209-K1-3" "0.145625" "2400" "349.5" "0.0005825" "250" "RF" "5" "5" "60" "134" "01.02.2015" "" "0" "1" "Al" "150216-K1-2" "0.0779628" "3600" "280.666" "0.000433127" "180" "RF" "5" "5" "60" "134" "01.02.2015" "" "0" "1" "Al" "150518-K1-2" "0.219333" "1500" "329" "0.00182778" "120" "RF" "2" "5" "60" "134" "" "" "0" "3" "Al" "111118-K3-5" "0.028" "" "49.5" "0.00035" "80" "DC" "3" "10" "40" "25" "wedge (central point)" "7.5" "0" "3" "Al" "111118-K3-6" "0.049" "" "87.5" "0.00035" "140" "DC" "3" "10" "40" "25" "wedge (central point)" "7.5" "0" "3" "Al" "121203-K3-1" "0.012" "" "65.5" "0.0003" "40" "RF" "1" "" "30" "25" "homogenious center" "7.5" "0" "3" "Al" "141024-K3-2" "0.047" "810" "39" "0.000313333" "150" "DC" "3" "5" "40" "25" "homogenious center; Ambios inacurate ?" "7.5" "0" "2" "Al" "100818-K2-1" "0.06751" "7273" "491" "0.0006751" "100" "DC" "3" "5" "60" "91.6" "WorkingDistance?" "" "0" "2" "Al" "100818-K2-2" "0.0677656" "5460" "370" "0.000677656" "100" "DC" "3" "5" "60" "91.6" "WorkingDistance?" "" "0" "2" "Al" "100818-K2-3" "0.068623" "2215" "152" "0.00068623" "100" "DC" "3" "5" "60" "91.6" "WorkingDistance?" "" "0" "2" "Al" "101001-K2-1" "0.0144444" "7200" "104" "9.62963e-005" "150" "RF" "3" "2" "20" "91.6" "" "" "0" "2" "Al" "101007-K2-1" "0.00606944" "14400" "87.4" "0.000202315" "30" "RF" "3" "2" "20" "91.6" "" "" "0" "2" "Al" "101012-K2-1" "0.0191667" "7200" "138" "0.00027381" "70" "RF" "3" "2" "20" "91.6" "" "" "0" "2" "Al" "101012-K2-2" "0.0348333" "5400" "188.1" "0.000232222" "150" "RF" "3" "2" "20" "91.6" "" "" "0" "2" "Al" "101018-K2-3" "0.0723333" "3000" "217" "0.000361667" "200" "RF" "3" "2" "20" "91.6" "" "" "0" "2" "Al" "150805-K2-1" "0.135" "1500" "202.4" "0.000674667" "200" "DC" "5" "5" "60" "91.6" "" "" "0" "2" "Al" "151001-K2-1" "0.048" "3600" "173.4" "0.000240833" "200" "RF" "1" "5" "60" "91.6" "" "" "0" "2" "Al" "160428-K2-2" "0.0889" "1800" "160" "0.000593" "150" "DC" "5" "5" "60" "91.6" "" "" "-1000" "3" "Al2O3" "130806-K3-3" "0.128" "4028" "515" "0.000365714" "350" "RF" "4" "5" "" "25" "homogenious center" "6" "-1000" "3" "Al2O3" "130806-K3-4" "0" "1800" "0" "" "200" "RF" "4" "5" "" "25" "homogenious center; target poisoning" "6" "-1000" "3" "AlN" "161121-K3-1" "0.0128" "7380" "94.5" "6.4e-005" "200" "DC5B" "3" "3.75" "" "25" "" "7.5" "-1000" "1" "AlN" "120723-K1-1" "0.0083" "3600" "30" "5.53333e-005" "150" "RF" "5" "5" "60" "138.9" "" "" "-1000" "1" "AlN" "120723-K1-2" "0.0115741" "10800" "125" "5.14403e-005" "225" "RF" "5" "5" "60" "138.9" "" "" "0" "1" "Au" "071107-K1-1" "0.0735556" "900" "66.2" "0.000735556" "100" "RF" "6" "5" "60" "136.9" "Book 5: July 2007-March 2008" "" "0" "1" "Au" "101018-K1-1" "0.032" "900" "28.8" "0.00032" "100" "RF" "4" "5" "60" "134.4" "Book 10: April 2010-Jan 2011" "" "0" "1" "Au" "101018-K1-2" "0.193333" "900" "174" "0.000773333" "250" "RF" "4" "5" "60" "134.4" "Book 10: April 2010-Jan 2011" "" "0" "1" "Au" "110112-K1-2" "0.193237" "2070" "400" "0.000772947" "250" "RF" "4" "5" "60" "134.4" "Book 10: April 2010-Jan 2011" "" "1" "1" "Au" "110309-K1-1" "0.033" "1800" "59.4" "0.00033" "100" "RF" "4" "5" "60" "136.4" "Book aktuell: Jan 2011- now" "" "0" "3" "Au" "110524-K3-1" "0.503" "" "905.7" "0.00335333" "150" "DC" "2" "5" "30" "25" "uniform" "7.5" "1" "2" "Au" "090723-K2-1" "0.203333" "1800" "366" "0.00135556" "150" "RF" "2" "5" "60" "91.6" "" "" "0" "2" "Au" "100601-K2-1" "0.2092" "2000" "418.4" "0.00139467" "150" "RF" "2" "5" "60" "91.6" "" "" "0" "2" "Au" "130310-K2-1" "0.132" "1800" "238" "0.00188889" "70" "DC" "5" "5" "60" "91.6" "measured with thin film ID (EDX)" "" "0" "2" "B" "070822-K2-1" "0.00334722" "7200" "24.1" "1.67361e-005" "200" "RF" "4" "5" "60" "91.6" "" "" "0" "2" "B" "070822-K2-2" "0.00398056" "7200" "28.66" "1.99028e-005" "200" "RF" "4" "1" "20" "91.6" "" "" "0" "2" "B" "070823-K2-1" "0.00514861" "7200" "37.07" "1.7162e-005" "300" "RF" "4" "5" "60" "91.6" "" "" "0" "2" "B" "090318-K2-1" "0.003" "7200" "21.6" "1e-005" "300" "RF" "" "5" "60" "91.6" "" "" "0" "2" "B" "101005-K2-1" "0.008" "7200" "57.6" "2.66667e-005" "300" "RF" "4" "2" "20" "91.6" "" "" "0" "2" "B" "101007-K2-2" "0.00821528" "14400" "118.3" "2.73843e-005" "300" "RF" "4" "2" "20" "91.6" "W-cap" "" "0" "2" "B" "130917-K2-1" "0.0542" "21600" "117" "1.80556e-005" "300" "RF" "1" "2" "30" "91.6" "ambios" "" "1" "1" "B" "080325-K1-1" "0.0045" "5400" "24.3" "1.8e-005" "250" "RF" "5" "5" "60" "136.9" "" "" "-1" "1" "B" "080327-K1-1" "0.00782407" "5400" "42.25" "3.12963e-005" "250" "RF" "5" "5" "60" "166.9" "Book 6: March 2008-April 2009" "" "0" "1" "B" "081222-K1-1" "0.00246296" "10800" "26.6" "9.85185e-006" "250" "RF" "5" "5" "60" "134.2" "Book 6: March 2008-April 2009" "" "0" "1" "B" "090317-K1-1" "0.00217593" "21600" "47" "8.7037e-006" "250" "RF" "5" "4.98" "60.1" "134.2" "Book 6: March 2008-April 2009" "" "1" "1" "B" "060310-K1-1" "0.00408998" "9780" "40" "2.72665e-005" "150" "RF" "5" "2" "20" "135" "Book 2: Aug 2005- April 2006" "" "0" "1" "B" "060313-K1-1" "0.00388889" "7200" "28" "2.59259e-005" "150" "RF" "5" "1" "20" "135" "Book 2: Aug 2005- April 2006" "" "0" "1" "Co" "050323-K1-?" "0.21" "1800" "378" "0.00105" "200" "DC" "1" "5" "60" "131.2" "" "" "0" "1" "Co" "050323-K1-1" "0.411667" "1800" "741" "0.00205833" "200" "RF" "1" "5" "80" "" "Book 1: June 2004- Aug 2005" "" "0" "1" "Co" "080417-K1-?" "0.055" "900" "49.5" "0.000275" "200" "RF" "6" "5" "60" "138.9" "" "" "0" "1" "Co" "080417-K1-2" "0.0549451" "3640" "200" "0.000274725" "200" "RF" "6" "5" "60" "138.9" "Book 6: March 2008-April 2009" "" "0" "1" "Co" "080424-K1-?" "0.063" "7200" "453.6" "0.000252" "250" "RF" "6" "5" "60" "138.9" "" "" "0" "1" "Co" "080424-K1-1" "0.0626389" "7200" "451" "0.000250556" "250" "RF" "6" "5" "60" "138.9" "Book 6: March 2008-April 2009" "" "0" "1" "Co" "121029-K1-3" "0.273" "500" "137" "0.002275" "120" "DC" "2" "2" "40" "" "" "" "0" "1" "Co" "150518-K1-1" "0.35625" "1200" "427.5" "0.002375" "150" "DC" "1" "5" "60" "134" "" "" "1" "1" "Co" "120914-K1-1" "0.11165" "" "" "" "80" "DC" "2" "5" "60" "138.4" "Co (new target); Book: Dec2011 -" "" "0" "2" "Co" "151019-K2-1" "0.077" "2000" "154.9" "0.000103" "75" "DC" "3" "5" "60" "91.6" "" "" "0" "2" "Co" "070124-K2-1" "0.0711698" "2650" "188.6" "0.000284679" "250" "RF" "3" "5" "60" "89" "" "" "0" "2" "Co" "070124-K2-2" "0.0891943" "2110" "188.2" "0.000297314" "300" "RF" "3" "5" "60" "89" "" "" "0" "2" "Co" "070125-K2-1" "0.0516497" "2455" "126.8" "0.000258248" "200" "RF" "3" "5" "60" "89" "" "" "0" "2" "Co" "070618-K2-1" "0.0781421" "1830" "143" "0.000294876" "265" "RF" "3" "5" "60" "91.6" "Wafer not positioned 100% correctly" "" "0" "2" "Co" "111219-K2-1" "0.034" "10000" "340" "0.000226667" "150" "RF" "1" "5" "60" "91.6" "" "" "1" "2" "Co" "120209-K2-1" "0.07656" "3200" "210" "0.00024858" "264" "RF" "1" "5" "60" "91.6" "" "" "0" "2" "Co" "150714-K2-1" "0.0246" "3600" "88.7" "0.000218043" "113" "RF" "" "5" "60" "91.6" "" "" "0" "3" "Co" "110608-K3-2" "0.136" "" "367.5" "0.00068" "200" "DC" "" "5" "30" "25" "" "7.5" "0" "3" "Cr" "121115-K3-1" "0.14" "" "42" "0.000933333" "150" "DC" "3" "1" "40" "25" "homogenious center" "7.5" "0" "3" "Cr" "121128-K3-6" "0.039" "" "208" "0.000975" "40" "DC" "3" "" "40" "25" "homogenious center" "7.5" "0" "1" "Cr" "060927-K1-3" "0.09264" "2500" "231.6" "0.000430884" "215" "RF" "6" "5" "60" "135" "Book 3: April 2006-Jan 2007" "" "0" "1" "Cr" "061103-K1-1" "0.0635" "1800" "114.3" "0.0003175" "200" "" "" "5" "60" "132" "" "" "0" "1" "Cr" "080411-K1-1" "0.709" "900" "638.1" "0.003545" "200" "DC" "1" "5" "60" "138.9" "Book 6: March 2008-April 2009" "" "0" "1" "Cr" "080411-K1-2" "0.705882" "425" "300" "0.00352941" "200" "DC" "1" "5" "60" "138.9" "Book 3: April 2006-Jan 2007" "" "0" "1" "Cr" "100118-K1-1" "0.662333" "900" "596.1" "0.00331167" "200" "DC" "1" "5" "60" "138.9" "Book 6: March 2008-April 2009" "" "0" "1" "Cr" "100804-K1-1" "0.0605" "1800" "108.9" "0.000242" "250" "RF" "4" "5" "60" "134.4" "Book 10: April 2010-Jan 2011" "" "0" "1" "Cr" "101014-K1-2" "0.0804259" "5400" "434.3" "0.000374074" "215" "RF" "5" "5" "60" "134.4" "Book 8: April 2009-April 2010" "" "0" "1" "Cr" "110302-K1-1" "0.025" "1800" "45" "0.00025" "100" "RF" "5" "5" "60" "136.4" "Book aktuell: Jan 2011- now" "" "0" "1" "Cr" "110302-K1-2" "0.081" "1800" "145.8" "0.000405" "200" "RF" "5" "5" "60" "136.4" "Book aktuell: Jan 2011- now" "" "0" "1" "Cr" "110316-K1-3" "0.055" "1800" "99" "0.00055" "100" "RF" "5" "15" "100" "185" "Book 10: April 2010-Jan 2011" "" "0" "1" "Cr" "120710-K1-2" "0.292" "500" "146" "0.00365" "80" "DC" "3" "2" "40" "" "" "" "0" "1" "Cr" "120711-K1-1" "0.248" "500" "124" "0.00354286" "70" "DC" "3" "2" "40" "" "" "" "1" "2" "Cr" "060118-K2-2" "0.118" "2041" "240" "0.00117589" "100" "DC" "4" "2" "20" "83" "" "" "0" "2" "Cr" "090529-K2-1" "0.164" "900" "148" "0.0010963" "150" "DC" "" "5" "30" "80" "Ar-Flow-? WorkingDistance-?" "" "0" "2" "Cr" "090603-K2-2" "0.089" "1200" "106.8" "0.000356" "250" "RF" "3" "5" "60" "91.6" "" "" "0" "2" "Cr" "090604-K2-1" "0.0582727" "2200" "128.2" "0.000306699" "190" "RF" "3" "5" "60" "91.6" "" "" "0" "2" "Cr" "100408-K2-1" "0.0540455" "2200" "118.9" "0.00028445" "190" "RF" "3" "5" "60" "91.6" "" "" "0" "2" "Cr" "100526-K2-1" "0.071" "3600" "255.6" "0.000373684" "190" "RF" "3" "5" "60" "91.6" "" "" "0" "2" "Cr" "110616-K2-1" "0.081" "1200" "97.5" "0.000325" "250" "RF" "3" "5" "60" "91.6" "" "" "1" "2" "Cu" "050216-K2" "0.18" "2900" "517" "0.00178276" "100" "DC" "5" "2" "30" "80" "" "" "0" "2" "Cu" "091029-K2" "0.097" "1800" "174.6" "0.000646667" "150" "RF" "2" "5" "60" "" "" "" "0" "2" "Cu" "120726-K2-1" "0.052" "1800" "" "" "150" "RF" "3" "5" "60" "91.6" "" "" "0" "1" "Cu" "101230-K1-1" "1.29" "2400" "3096" "0.00516" "250" "DC" "2" "5" "60" "134.4" "Book 8: April 2009-April 2010" "" "0" "1" "Cu" "110225-K1-1" "0.389" "2700" "1050.3" "0.00389" "100" "DC" "2" "5" "60" "136.4" "Book aktuell: Jan 2011- now" "" "0" "1" "Cu" "110311-K1-2" "0.166" "2700" "448.2" "0.00332" "50" "DC" "2" "5" "60" "136.4" "Book aktuell: Jan 2011- now" "" "0" "1" "Cu" "110311-K1-3" "0.268" "1800" "482.4" "0.00357333" "75" "DC" "2" "5" "60" "136.4" "Book aktuell: Jan 2011- now" "" "0" "1" "Cu" "110315-K1-2" "0.225" "1800" "405" "0.00394737" "57" "DC" "2" "5" "60" "136.4" "Book aktuell: Jan 2011- now" "" "0" "1" "Cu" "110316-K1-1" "0.205" "1800" "369" "0.00372727" "55" "DC" "2" "5" "60" "136.4" "Book aktuell: Jan 2011- now" "" "0" "1" "Cu" "110318-K1-1" "0.388462" "1300" "505" "0.00388462" "100" "DC" "2" "5" "60" "136.4" "Book aktuell: Jan 2011- now" "" "0" "1" "Cu" "110325-K1-1" "0.0829" "900" "74.61" "0.000829" "100" "RF" "5" "5" "60" "185" "Book 10: April 2010-Jan 2011" "" "0" "1" "Cu" "120102-K1-1" "0.031" "2145" "67.2" "0.000391608" "80" "RF" "5" "5" "60" "136.9" "" "" "1" "1" "Cu" "050224-K1-?" "0.21" "1800" "378" "0.0007" "300" "RF" "5" "5" "60" "129.6" "Book aktuell: Jan 2011- now" "" "0" "1" "Cu" "100412-K1-3" "0.11" "1800" "198" "0.000733333" "150" "RF" "5" "5" "60" "136.4" "" "" "0" "3" "Cu" "121115-K3-2" "0.2" "" "121" "0.002" "100" "DC(p) (0kHz)" "2" "1" "40" "25" "homogenious center" "7.5" "0" "3" "Cu" "211107-K3-1" "0.088" "1800" "157.6" "0.000586667" "150" "DC (DCXS-1500)" "2" "5" "30" "25" "uniform rotation 75%; on 15 nm Ti" "7.5" "0" "3" "Fe" "111118-K3-1" "0.052" "" "47" "0.00052" "100" "DC" "4" "10" "40" "25" "wedge (central point)" "7.5" "0" "3" "Fe" "111118-K3-2" "0.092" "" "83" "0.000613333" "150" "DC" "4" "10" "40" "25" "wedge (central point)" "7.5" "0" "3" "Fe" "120704-K3-2" "" "" "41" "" "50" "RF" "4" "1" "35" "25" "end-to-end" "7.5" "0" "3" "Fe" "150522-K3-1" "0.142" "1200" "171" "0.000946667" "150" "DC" "4" "3.75" "40" "25" "homogenious center" "7.5" "0" "1" "Fe" "050224-K1-2" "0.302778" "1800" "545" "0.00203207" "149" "DC" "3" "5" "80" "129.6" "Book 1: June 2004- Aug 2005" "" "0" "1" "Fe" "050224-K1-3" "0.29" "1800" "522" "0.00193333" "150" "DC" "3" "5" "60" "129.6" "" "" "0" "1" "Fe" "050322-K1-1" "0.6575" "1200" "789" "0.00219167" "300" "RF" "3" "5" "80" "131.2" "Book 1: June 2004- Aug 2005" "" "0" "1" "Fe" "050418-K1-1" "0.6" "684" "410.4" "0.002" "300" "DC" "3" "5" "60" "131.2" "" "" "0" "1" "Fe" "050421-K1-1" "0.58" "334" "193.72" "0.00193333" "300" "DC" "" "5" "60" "131.2" "" "" "0" "1" "Fe" "060420-K1-1" "0.176375" "3600" "634.95" "0.00176375" "100" "DC" "" "5" "60" "" "Book 1: June 2004- Aug 2005" "" "0" "1" "Fe" "060509-K2-1" "0.0449683" "2206" "99.2" "0.000899365" "50" "" "4" "20" "80" "89" "Book 3: April 2006-Jan 2007" "" "0" "1" "Fe" "060927-K1-1" "0.25" "900" "225" "0.00166667" "150" "DC" "1" "5" "60" "135" "" "" "0" "1" "Fe" "070115-K1-1" "0.105444" "1800" "189.8" "0.000527222" "200" "RF" "4" "5" "60" "135" "Book 2: Aug 2005- April 2006" "" "0" "1" "Fe" "070418-K1-2" "0.193333" "900" "174" "0.00193333" "100" "" "" "5" "60" "" "Book 3: April 2006-Jan 2007" "" "0" "1" "Fe" "080516-K1-1" "0.16" "1000" "160" "0.00216216" "74" "DC" "2" "5" "60" "136.9" "" "" "0" "1" "Fe" "081223-K1-1" "0.15" "1800" "270" "0.00202703" "74" "DC" "3" "5" "60" "134.2" "Book 8: April 2009-April 2010" "" "0" "1" "Fe" "090612-K1-2" "0.0208333" "1200" "25" "0.000138889" "150" "DC" "3" "5" "60" "" "Book 8: April 2009-April 2010" "" "0" "1" "Fe" "090618-K1-1" "0.0511111" "3600" "184" "0.000205266" "249" "DC" "3" "5.02" "60" "134.2" "Book 8: April 2009-April 2010" "" "0" "1" "Fe" "090708-K1-3" "0.16" "1000" "160" "0.00064257" "249" "DC" "3" "4.95" "60.1" "" "Book 8: April 2009-April 2010" "" "0" "1" "Fe" "090805-K1-2" "0.0565" "2000" "113" "0.000226908" "249" "DC" "3" "4.96" "60.1" "134.2" "Book 8: April 2009-April 2010" "" "0" "1" "Fe" "090806-K1-1" "0.052" "2000" "104" "0.000208835" "249" "DC" "3" "4.99" "60.2" "134.2" "Book 8: April 2009-April 2010" "" "0" "1" "Fe" "090817-K1-1" "0.0685" "2000" "137" "0.0017125" "40" "DC" "4" "5.05" "60.1" "134.2" "Book 8: April 2009-April 2010" "" "0" "1" "Fe" "090817-K1-2" "0.0169323" "4016" "68" "6.77291e-005" "250" "DC" "3" "5.02" "60.1" "134.2" "Book 6: March 2008-April 2009" "" "0" "1" "Fe" "140826-K1-2" "0.0527778" "1800" "95" "0.00175926" "30" "DC" "2" "5" "60" "134" "" "" "0" "1" "Fe" "150601-K1-1" "0.353333" "1500" "530" "0.00235556" "150" "DC" "1" "5" "60" "134" "" "" "1" "1" "Fe" "120913-K1-1" "0.13" "1000" "130" "" "100" "DC1" "1" "5" "60" "138.4" "Fe (new thin target); Book :Nov 2012" "" "0" "2" "Fe" "051111-K2-1" "0.12145" "2000" "242.9" "0.000809667" "150" "DC" "5" "5" "80" "80" "" "" "0" "2" "Fe" "060420-K2-1" "0.128052" "2310" "295.8" "0.00085368" "150" "DC" "4" "5" "80" "83" "" "" "0" "2" "Fe" "060426-K2-2" "0.137916" "1171" "161.5" "0.000919442" "150" "DC" "4" "5" "80" "89" "" "" "0" "2" "Fe" "060508-K2-1" "0.0703536" "2206" "155.2" "0.000847634" "83" "DC?" "4" "5" "80" "89" "" "" "0" "2" "Fe" "060508-K2-2" "0.065" "2206" "142.65" "0.000862194" "75" "DC" "4" "5" "80" "89" "" "" "0" "2" "Fe" "060731-K2-1" "0.0384523" "1667" "64.1" "0.000384523" "100" "DC" "5" "5" "60" "89" "" "" "0" "2" "Fe" "061214-K2-1" "0.0845831" "1667" "141" "0.000845831" "100" "DC" "5" "5" "60" "89" "Pd-cap" "" "0" "2" "Fe" "070111-K2-1" "0.199867" "1500" "299.8" "0.000999333" "200" "DC" "5" "5" "60" "89" "" "" "0" "2" "Fe" "070116-K2-1" "0.0741333" "1500" "111.2" "0.00148267" "50" "DC" "5" "5" "60" "89" "O2-Leak suspected" "" "0" "2" "Fe" "070130-K2-1" "0.0208286" "3500" "72.9" "0.000694286" "30" "DC" "5" "5" "60" "89" "" "" "0" "2" "Fe" "070212-K2-1" "0.0864" "2000" "172.8" "0.000864" "100" "DC" "5" "5" "60" "89" "Pd-cap, (hc target holes + slots -> plug cut out for AES)" "" "0" "2" "Fe" "070622-K2-1" "0.0183889" "3600" "66.2" "0.000245185" "75" "DC" "5" "5" "60" "91.6" "" "" "0" "2" "Fe" "071001-K2-1" "0.0564134" "2830" "159.65" "0.000696462" "81" "DC" "5" "5" "80" "91.6" "Pt cap" "" "0" "2" "Fe" "071008-K2-1" "0.0168644" "6742" "113.7" "0.000496013" "34" "DC" "5" "5" "80" "91.6" "Pt cap; Catode-?" "" "0" "2" "Fe" "071009-K2-1" "0.0156984" "6300" "98.9" "0.000461718" "34" "DC" "5" "5" "80" "88.2" "Pt cap; Catode-?" "" "0" "2" "Fe" "071010-K2-2" "0.0166825" "6300" "105.1" "0.000490663" "34" "DC" "5" "5" "80" "78.2" "Pt cap" "" "0" "2" "Fe" "090323-K2-1" "0.016" "5490" "87.84" "0.000533333" "30" "DC" "" "5" "30" "80" "Ar-Flow-? WorkingDistance-?" "" "0" "2" "Fe" "091021-K2-3" "0.122" "500" "61" "0.000813333" "150" "DC" "4" "5" "60" "91.6" "Catode-?" "" "0" "2" "Fe" "110302-K2-1" "" "" "0" "" "" "" "" "" "" "" "" "" "0" "2" "Fe" "120208-K2-2" "0.0433" "6000" "234" "0.00065" "60" "DC" "3" "5" "60" "91.6" "NEW TARGET" "" "0" "2" "Fe" "170712-K2" "" "69500" "" "" "100" "DC" "" "" "" "" "Fe target (slots) lifetime; Power - ? 8380 sec preclean" "" "1" "2" "Fe" "141003-K2-1" "0.075" "1400" "105" "" "" "DC3_RF4" "" "2" "30" "91.6" "FeCo (Fe _new target - Co target" "" "0" "2" "Fe" "060711-K2-1" "0.104815" "1163" "121.9" "0.000698768" "150" "DC" "4" "5" "60" "89" "Fe-hc; plasma flickering" "" "-1000" "1" "FeCo" "060109-K1-1" "0.09" "900" "81" "0.0018" "50" "DC" "1" "5" "60" "136" "" "" "-1000" "1" "FeCo" "070509-K1-1" "0.2" "900" "180" "0.002" "100" "DC" "2" "5" "60" "139.3" "" "" "-1000" "1" "FeCo" "070823-K1-2" "0.205" "1000" "205" "0.00205" "100" "DC" "2" "5" "60" "135" "" "" "-1000" "1" "FeCo" "120910-K1-1" "0.203" "1000" "203" "0.00203" "100" "DC" "2" "5" "60" "138.9" "" "" "-1000" "1" "FeCo" "121128-K1-1" "0.05875" "4000" "235" "0.00195833" "30" "DC" "2" "5" "60" "138.9" "Book : Dec 2011- Okt 2011" "" "-1000" "1" "FeCo" "121129-K1-1" "0.0863" "3000" "259" "0.00205556" "42" "DC" "2" "5" "60" "138.9" "Book :Nov 2012" "" "-1000" "1" "FeCoV" "050330-K1-1" "0.45" "1800" "810" "0.00225" "200" "DC" "1" "5" "60" "131.2" "" "" "0" "1" "Gd" "150518-K1-5" "0.2056" "2500" "514" "0.00137067" "150" "RF" "5" "5" "60" "134" "" "" "0" "2" "Gd" "140107-K2-1" "0.195" "1200" "234" "0.00195" "100" "DC" "5" "5" "60" "91.6" "" "" "0" "2" "Ge" "160108-K2-1" "0.121" "1800" "218" "0.000603" "200" "RF" "1" "5" "60" "91.6" "" "" "0" "2" "Ge" "160114-K2-1" "0.016" "5400" "88" "0.000273" "60" "RF" "1" "5" "60" "91.6" "" "" "0" "1" "Ge" "140826-K1-1" "0.138889" "1800" "250" "0.000555556" "250" "RF" "6" "5" "60" "134" "" "" "0" "1" "Ge" "150518-K1-3" "0.084375" "2400" "202.5" "0.0003375" "250" "RF" "4" "5" "60" "134" "" "" "0" "1" "Ge" "160128-K1-1" "0.0381111" "1800" "68.6" "0.000254074" "150" "RF" "4" "5" "60" "134" "" "" "1" "1" "Hf" "061128-K1-1" "0.042" "1800" "75.6" "0.00042" "100" "RF" "5" "5" "60" "132" "" "" "0" "1" "Hf" "061129-K1-1" "0.106" "1800" "190.8" "0.00053" "200" "RF" "5" "5" "60" "132" "Book 3: April 2006-Jan 2007" "" "0" "2" "Hf" "071112-K2-3" "0.0959722" "3600" "345.5" "0.000479861" "200" "RF" "5" "5" "60" "91.6" "" "" "0" "2" "Mg" "051026-K2-1" "0.343889" "1800" "619" "0.00171944" "200" "RF" "1" "1" "20" "80" "" "" "1" "2" "Mg" "060117-K2-2" "0.14" "1800" "257.4" "0.00143" "100" "RF" "1" "1" "20" "83" "" "" "0" "2" "Mg" "060118-K2-1" "0.146853" "715" "105" "0.00146853" "100" "RF" "" "1" "20" "83" "" "" "0" "2" "Mg" "060321-K2-1" "0.137754" "690" "95.05" "0.00137754" "100" "RF" "1" "1" "40" "83" "" "" "0" "2" "Mg" "060322-K2-1" "0.126501" "3450" "436.43" "0.00126501" "100" "RF" "1" "1" "20" "83" "" "" "0" "2" "Mg" "060628-K2-1" "0.14" "1470" "205.8" "0.0014" "100" "RF" "1" "1" "20" "89" "" "" "0" "2" "Mg" "061012-K2-1" "0.139" "1470" "204.6" "0.00139184" "100" "RF" "3" "1" "20" "89" "" "" "0" "2" "Mg" "070306-K2-1" "0.0616333" "1500" "92.45" "0.00123267" "50" "RF" "1" "1" "20" "89" "Pd-cap" "" "0" "2" "Mg" "070824-K2-1" "0.01251" "6000" "75.06" "0.0005004" "25" "RF" "1" "5" "60" "91.6" "" "" "0" "2" "Mg" "080214-K2-2" "0.0689583" "1440" "99.3" "0.000689583" "100" "RF" "1" "5" "60" "91.6" "Pd cap" "" "0" "2" "Mg" "100727-K2-1" "0.130435" "690" "90" "0.00130435" "100" "RF" "1" "1" "20" "91.6" "Pd-cap" "" "0" "2" "Mg" "100930-K2-1" "0.0430833" "3600" "155.1" "0.000861667" "50" "RF" "1" "2" "20" "91.6" "W-cap" "" "0" "2" "Mg" "101001-K2-2" "0.0190556" "5400" "102.9" "0.000635185" "30" "RF" "1" "2" "20" "91.6" "W-cap" "" "0" "2" "Mg" "101001-K2-3" "0.0190556" "7200" "137.2" "0.000635185" "30" "RF" "1" "2" "20" "91.6" "W-cap" "" "0" "2" "Mg" "101002-K2-1" "0.0110278" "10800" "119.1" "0.000551389" "20" "RF" "1" "2" "20" "91.6" "W-cap" "" "0" "2" "Mg" "101013-K2-1" "0.0508333" "3600" "183" "0.00072619" "70" "RF" "1" "2" "20" "91.6" "W-cap" "" "0" "2" "Mg" "101013-K2-2" "0.0979444" "1800" "176.3" "0.000816204" "120" "RF" "1" "2" "20" "91.6" "W-cap" "" "0" "2" "Mg" "101015-K2-2" "0.0231852" "5400" "125.2" "0.00057963" "40" "RF" "1" "2" "20" "91.6" "W-cap" "" "0" "2" "Mg" "101018-K2-2" "0.16" "1000" "160" "0.0008" "200" "RF" "1" "2" "20" "91.6" "W-cap" "" "0" "2" "Mg" "110411-K2-1" "0.127" "1430" "182.2" "0.000637063" "200" "RF" "5" "5" "60" "91.6" "Mg-Rate+Ti Cap" "" "0" "3" "Mg" "120625-K3-2" "0.047" "" "85" "0.00094" "50" "DC" "2" "10" "40" "25" "uniform" "7.5" "0" "3" "Mg" "120626-K3-1" "0.103" "" "185" "0.000686667" "150" "RF" "2" "10" "40" "25" "uniform" "7.5" "-1000" "2" "MgB2" "070518-K2-2" "0.027" "1800" "48.6" "9e-005" "300" "RF" "" "1" "20" "91.6" "" "" "-1000" "2" "MgB2" "070521-K2" "0.046" "1800" "82.8" "0.00023" "200" "DC" "" "1" "20" "91.6" "" "" "-1000" "2" "MgB2" "100727-K2-2" "0.00962963" "5400" "52" "0.000196523" "49" "DC pulse" "5" "1" "20" "91.6" "" "" "-1000" "2" "MgB2" "101102-K2-1" "0.0129167" "7200" "93" "0.000187198" "69" "DC pulse" "2" "2" "20" "91.6" "" "" "-1000" "2" "MgB2" "101102-K2-2" "0.00861111" "10800" "93" "0.000172222" "50" "DC pulse" "2" "2" "20" "91.6" "" "" "0" "2" "Mn" "070124-K2-3" "0.084" "2650" "222.6" "0.000409756" "205" "RF" "1" "5" "60" "89" "Pd-cap" "" "0" "2" "Mn" "070124-K2-4" "0.104171" "2110" "219.8" "0.000416682" "250" "RF" "1" "5" "60" "89" "Pd-cap" "" "0" "2" "Mn" "070125-K2-2" "0.0538942" "2080" "112.1" "0.000359295" "150" "RF" "1" "5" "60" "89" "" "" "1" "2" "Mn" "070618-K2-2" "0.0826452" "1550" "128.1" "0.000367312" "225" "RF" "4" "5" "60" "91.6" "Pd-cap" "" "0" "2" "Mn" "140710-K2-4" "0.051" "2800" "143" "0.0003405" "150" "RF" "5" "5" "60" "91.6" "" "" "0" "1" "Mn" "090928-K1-?" "0.0666" "3600" "239.76" "0.000222" "300" "RF" "2" "5" "60" "134.4" "Book 8: April 2009-April 2010" "" "0" "1" "Mn" "090928-K1-1" "0.0388333" "3600" "139.8" "0.000194167" "200" "RF" "4" "5" "60" "134.4" "Book 8: April 2009-April 2010" "" "0" "1" "Mn" "090928-K1-2" "0.0666111" "3600" "239.8" "0.000222037" "300" "RF" "4" "5" "60" "134.4" "" "" "1" "1" "Mn" "160126-K1-2" "0.1235" "2000" "247" "0.0006175" "200" "RF" "6" "5" "60" "134" "" "" "1" "1" "Mo" "100410-K1-?" "0.024" "2700" "64.8" "8e-005" "300" "RF" "2" "5" "60" "134.4" "Book 8: April 2009-April 2010" "" "0" "1" "Mo" "100419-K1-1" "0.023963" "2700" "64.7" "0.000119815" "200" "RF" "4" "5" "60" "134.4" "Book 8: April 2009-April 2010" "" "0" "1" "Mo" "100427-K1-1" "0.0556296" "2700" "150.2" "0.000185432" "300" "RF" "4" "5" "60" "134.4" "book Jan 2014" "" "0" "2" "Mo" "100525-K2-1" "0.06975" "3600" "251.1" "0.00034875" "200" "RF" "1" "5" "60" "91.6" "" "" "0" "2" "Mo" "100526-K2-3" "0.285556" "3600" "1028" "0.00142778" "200" "DC constant" "1" "5" "60" "91.6" "" "" "0" "2" "Nb" "071112-K2-2" "0.0490833" "3600" "176.7" "0.000245417" "200" "RF" "4" "5" "60" "91.6" "" "" "0" "2" "Nb" "081118-K2-2" "0.0150833" "3600" "54.3" "0.000150833" "100" "RF" "1" "5" "60" "91.6" "" "" "0" "2" "Nb" "100526-K2-2" "0.134333" "3600" "483.6" "0.000895556" "150" "DC constant" "4" "5" "60" "91.6" "" "" "0" "2" "Nb" "100614-K2-2" "0.283" "2700" "764.1" "0.001132" "250" "DC constant" "4" "5" "60" "91.6" "" "" "1" "2" "Nb" "100906-K2-1" "0.0592593" "5400" "320" "0.000296296" "200" "RF" "2" "5" "60" "91.6" "single crystal target" "" "0" "2" "Nb" "180220-K2-1" "0.182" "1800" "328" "0.00122" "150" "DC" "5" "5" "60" "91.6" "" "" "0" "1" "Nb" "090323-K1-1" "0.175139" "1800" "315.25" "0.00175139" "100" "DC" "2" "5" "60" "134.4" "Book 6: March 2008-April 2009" "" "0" "1" "Nb" "090401-K1-1" "0.0698333" "1800" "125.7" "0.00155185" "45" "DC" "2" "5" "60" "134.4" "" "" "0" "1" "Nb" "100713-K1-2" "0.023" "3600" "82.8" "0.000115" "200" "RF" "4" "5" "60" "134.4" "Book 10: April 2010-Jan 2011" "" "0" "1" "Nb" "100715-K1-1" "0.0448333" "5400" "242.1" "0.000149444" "300" "RF" "4" "5" "60" "134.4" "Book 10: April 2010-Jan 2011" "" "0" "1" "Nb" "100914-K1-1" "0.0957407" "5400" "517" "0.000319136" "300" "RF" "5" "5" "60" "134.4" "Book 10: April 2010-Jan 2011" "" "0" "1" "Nb" "100929-K1-1" "0.319" "1800" "574.2" "0.00212667" "150" "DC" "2" "5" "60" "134.4" "Book 10: April 2010-Jan 2011" "" "0" "1" "Nb" "100929-K1-2" "0.319" "1800" "574.2" "0.00212667" "150" "DC" "2" "5" "60" "134.4" "Book 10: April 2010-Jan 2011" "" "0" "1" "Nb" "101028-K1-1" "0.303586" "1255" "381" "0.0020239" "150" "DC" "3" "5.1" "60" "134.4" "Book 6: March 2008-April 2009" "" "0" "1" "Nb" "120320-K1-1" "0.0154167" "3600" "55.5" "0.000102778" "150" "RF" "4" "5" "60" "138.9" "" "" "0" "1" "Nb" "120320-K1-2" "0.0351944" "3600" "126.7" "0.000175972" "200" "RF" "4" "5" "60" "138.9" "" "" "0" "1" "Nb" "120321-K1-1" "0.0514167" "3600" "185.1" "0.000205667" "250" "RF" "4" "5" "60" "138.9" "" "" "0" "1" "Nb" "120913-K1-3" "0.106667" "1500" "160" "" "250" "RF" "6" "5" "60" "" "" "" "0" "1" "Nb" "121212-K1-3" "0.23" "1200" "276" "" "120" "DC" "2" "5" "60" "138.9" "" "" "1" "1" "Nb" "140902-K1-3" "0.0372" "1800" "67" "0.000148889" "250" "RF" "1" "5" "60" "" "Book: November 2012 -" "" "-1000" "1" "Nd2Fe14B" "180418-K1-1" "0.149222" "1800" "268.6" "0.00149222" "100" "DC" "1" "5" "60" "141" "" "" "1" "1" "Ni" "050502-K1-1" "0.49" "1800" "882" "0.00245" "200" "DC" "2" "5" "60" "131.2" "" "" "0" "1" "Ni" "090527-K1-1" "0.1817" "1800" "327.06" "0.00242267" "75" "DC" "2" "5" "60" "134.2" "Book aktuell: Jan 2011- now" "" "0" "1" "Ni" "090616-K1-1" "0.177778" "1800" "320" "0.00237037" "75" "DC" "2" "5" "60" "134.4" "Book 6: March 2008-April 2009" "" "0" "1" "Ni" "110127-K1-2" "0.223" "1800" "401.2" "0.00297333" "75" "DC" "1" "1" "20" "185" "Book aktuell: Jan 2011- now" "" "0" "1" "Ni" "110127-K1-3" "0.372" "600" "223" "0.00371667" "100" "DC" "1" "1" "20" "185" "Book aktuell: Jan 2011- now" "" "0" "1" "Ni" "110127-K1-4" "0.411" "450" "184.8" "0.00548" "75" "DC" "1" "1" "20" "185" "Book aktuell: Jan 2011- now" "" "0" "1" "Ni" "110405-K1-1" "0.2215" "1800" "398.7" "0.002215" "100" "DC" "1" "5" "60" "136.4" "" "" "0" "1" "Ni" "110412-K1-1" "0.323" "900" "290.7" "0.00538333" "60" "DC" "1" "5" "60" "185" "Book 8: April 2009-April 2010" "" "0" "1" "Ni" "120202-K1-1" "0.0792" "2500" "198" "0.00198" "40" "DC" "2" "5" "60" "138.9" "" "" "0" "1" "Ni" "120404-K1-3" "0.248" "500" "124" "0.00248" "100" "DC" "2" "2" "40" "" "" "" "0" "1" "Ni" "120709-K1-1" "0.252" "500" "126" "0.00252" "100" "DC" "2" "2" "40" "138.1" "Book aktuell: Jan 2011- now" "" "1" "1" "Ni" "120730-K1-1" "0.183" "1800" "330" "0.00244" "75" "DC" "2" "5" "60" "" "" "" "0" "2" "Ni" "091103-K2-1" "0.061" "1800" "109.8" "0.000305" "200" "RF" "1" "5" "60" "" "" "" "0" "2" "Ni" "100412-K2-2" "0.052" "1800" "93.6" "0.00026" "200" "RF" "1" "5" "60" "" "" "" "0" "2" "Ni" "100825-K2-1" "0.0585122" "6614" "387" "0.000292561" "200" "RF" "1" "5" "60" "91.6" "" "" "0" "2" "Ni" "100825-K2-2" "0.0573756" "5769" "331" "0.000286878" "200" "RF" "1" "5" "60" "" "" "" "0" "2" "Ni" "100826-K2-1" "0.0540984" "2440" "132" "0.000270492" "200" "RF" "1" "5" "60" "" "" "" "0" "2" "Ni" "140424-K2-1" "0.06" "1800" "108" "0.0003" "200" "RF" "1" "5" "60" "91.6" "" "" "0" "2" "Ni" "150806-K2-1" "0.099" "1500" "148" "0.0010963" "90" "DC" "1" "5" "60" "91.6" "" "" "0" "2" "Ni" "151020-K2-1" "0.054" "1800" "98.8" "0.00031" "177" "RF" "1" "5" "60" "91.6" "" "" "0" "1" "Ni" "060608-K1-2" "0.104944" "3600" "377.8" "0.00209889" "50" "DC" "" "5" "60" "144" "Book 1: June 2004- Aug 2005; Distance-?" "" "1" "2" "Ni" "050302-K2" "0.04" "1800" "72" "0.000266667" "150" "RF" "" "5" "80" "80.3" "" "" "1" "2" "Pd" "050406-K2-1" "0.13" "3600" "455.6" "0.000843704" "150" "RF" "2" "2" "80" "80.3" "" "" "0" "2" "Pd" "060121-K2-1" "0.102" "2000" "204" "0.00051" "200" "RF" "" "20" "80" "83" "" "" "0" "2" "Pd" "060321-K2-2" "0.294748" "119" "35.075" "0.000982493" "300" "RF" "2" "1" "20" "83" "" "" "0" "2" "Pd" "060322-K2-2" "0.276875" "400" "110.75" "0.000922917" "300" "RF" "2" "1" "20" "83" "" "" "0" "2" "Pd" "060614-K2-2" "0.103" "1000" "103" "0.000515" "200" "RF" "2" "20" "80" "89" "with Fe-adhesion layer" "" "0" "2" "Pd" "060712-K2-1" "0.250909" "935" "234.6" "0.00135627" "185" "RF" "2" "5" "60" "89" "mostly peeled" "" "0" "2" "Pd" "061221-K2-1" "0.186" "1000" "185.6" "0.000928" "200" "RF" "2" "5" "60" "89" "" "" "0" "2" "Pd" "061222-K2-1" "0.143" "1000" "143" "0.000959732" "149" "RF" "2" "5" "60" "89" "" "" "0" "2" "Pd" "061227-K2-1" "0.094" "1500" "141" "0.000895238" "105" "RF" "2" "5" "60" "89" "Ti adhesion layer" "" "0" "2" "Pd" "070111-K2-2" "0.03575" "2000" "71.5" "0.000715" "50" "RF" "2" "5" "60" "89" "" "" "0" "2" "Pd" "080121-K2-1" "0.297143" "350" "104" "0.000990476" "300" "RF" "2" "1" "20" "91.6" "" "" "0" "2" "Pd" "090420-K2-1" "0.0675" "2000" "135" "0.000675" "100" "RF" "2" "5" "60" "91.6" "" "" "0" "2" "Pd" "090420-K2-2" "0.0595" "2000" "119" "0.000661111" "90" "RF" "2" "5" "60" "91.6" "" "" "0" "2" "Pd" "090420-K2-3" "0.0475" "2000" "95" "0.000601266" "79" "RF" "2" "5" "60" "91.6" "" "" "0" "2" "Pd" "091027-K2-3" "0.106" "700" "74.2" "0.000706667" "150" "RF" "5" "5" "60" "" "" "" "0" "2" "Pd" "110202-K2-4" "0.0865" "1000" "86.5" "0.000576667" "150" "RF" "5" "20" "80" "91.6" "" "" "0" "1" "Pd" "060407-K1-1" "0.0740741" "2700" "200" "0.00148148" "50" "DC" "" "2" "60" "" "" "" "0" "1" "Pd" "080410-K1-1" "0.151" "900" "135.9" "0.00100667" "150" "RF" "6" "5" "60" "138.9" "" "" "0" "1" "Pd" "080416-K1-1" "0.608" "900" "547.2" "0.00608" "100" "DC" "1" "5" "60" "138.9" "" "" "0" "1" "Pd" "080416-K1-2" "0.289167" "360" "104.1" "0.00578333" "50" "RF" "1" "5" "60" "138.9" "Book 6: March 2008-April 2009" "" "1" "1" "Pd" "080516-K1-2" "0.105" "1200" "126" "0.0075" "14" "DC" "1" "5" "60" "136.9" "" "" "0" "1" "Pd" "090316-K1-2" "0.207" "1000" "207" "0.00115" "180" "RF" "6" "4.99" "60" "134.2" "Book 6: March 2008-April 2009" "" "0" "1" "Pd" "090316-K1-4" "0.071" "1000" "71" "0.000645455" "110" "RF" "6" "5" "60.1" "134.2" "Book 6: March 2008-April 2009" "" "0" "1" "Pd" "090318-K1-2" "0.112" "1000" "112" "0.00082963" "135" "RF" "6" "5" "60.1" "134.2" "Book 2: Aug 2005- April 2006" "" "0" "1" "Pd" "090527-K1-3" "0.0566667" "1800" "102" "0.000566667" "100" "RF" "" "5" "60" "" "Book 8: April 2009-April 2010" "" "0" "1" "Pd" "090615-K1-2" "0.0483333" "1800" "87" "0.000483333" "100" "" "" "5" "60" "134.4" "Book 8: April 2009-April 2010" "" "0" "1" "Pd" "090618-K1-3" "0.121667" "1200" "146" "0.000869048" "140" "RF" "6" "4.99" "60.3" "134.2" "Book 6: March 2008-April 2009" "" "0" "1" "Pt" "050316-K1-1" "0.0788889" "1800" "142" "0.000394444" "200" "RF" "4" "5" "80" "131.2" "Book 1: June 2004- Aug 2005" "" "0" "1" "Pt" "050317-K1-1" "0.0162963" "2700" "44" "0.000162963" "100" "RF" "4" "5" "80" "131.2" "Book 1: June 2004- Aug 2005" "" "1" "1" "Pt" "050401-K1-?" "0.12" "2700" "324" "0.00048" "250" "RF" "4" "5" "60" "131.2" "" "" "0" "1" "Pt" "050401-K1-01" "0.118481" "2700" "319.9" "0.000473926" "250" "RF" "4" "5" "80" "131.2" "" "" "0" "1" "Pt" "061026-K1-?" "0.12" "1942" "233.04" "0.00048" "250" "RF" "4" "5" "60" "132" "" "" "0" "1" "Pt" "070419-K1-1" "0.04" "2400" "96" "0.0002" "200" "RF" "" "5" "60" "" "Book 4: Jan 2007-July 2007" "" "0" "1" "Pt" "070419-K1-2" "0.00444444" "2700" "12" "4.44444e-005" "100" "RF" "" "5" "60" "" "Book 4: Jan 2007-July 2007" "" "0" "1" "Pt" "070419-K1-4" "0.045" "1000" "45" "0.000225" "200" "" "" "5" "60" "" "Book 1: June 2004- Aug 2005" "" "0" "1" "Pt" "071108-K1-2" "0.0523589" "7300" "382.22" "0.000261795" "200" "RF" "4" "5" "60" "136.9" "Book 4: Jan 2007-July 2007" "" "0" "1" "Pt" "080515-K1-?" "0.024" "4500" "108" "0.00016" "150" "RF" "4" "5" "60" "136.9" "" "" "0" "1" "Pt" "080519-K1-1" "0.089875" "2400" "215.7" "0.0003595" "250" "RF" "4" "5" "60" "136.9" "Book 6: March 2008-April 2009" "" "0" "1" "Pt" "080520-K1-?" "0.09" "2400" "216" "0.00036" "250" "RF" "4" "5" "60" "136.9" "" "" "0" "1" "Pt" "090316-K1-1" "0.065" "1000" "65" "0.000325" "200" "RF" "4" "5.06" "60" "134.2" "Book 6: March 2008-April 2009" "" "0" "1" "Pt" "090316-K1-3" "0.041" "1000" "41" "0.000261146" "157" "RF" "4" "4.99" "60" "134.2" "Book 6: March 2008-April 2009" "" "0" "1" "Pt" "090318-K1-1" "0.014" "1000" "14" "0.00014" "100" "RF" "4" "4.99" "60" "134.2" "Book 6: March 2008-April 2009" "" "0" "1" "Pt" "090324-K1-1" "0.0668954" "2915" "195" "0.000334477" "200" "RF" "4" "5" "60" "136.9" "Book 5: July 2007-March 2008" "" "0" "1" "Pt" "090618-K1-?" "0.0708" "1200" "84.96" "0.000354" "200" "RF" "4" "5" "60" "134.2" "Book 8: April 2009-April 2010" "" "0" "1" "Pt" "090618-K1-2" "0.0708333" "1200" "85" "0.000354167" "200" "RF" "4" "4.98" "60.1" "134.2" "Book 8: April 2009-April 2010" "" "0" "1" "Pt" "090625-K1-1" "0.0382409" "2615" "100" "0.000764818" "50" "RF" "4" "5" "60" "136.9" "Book 8: April 2009-April 2010" "" "0" "1" "Pt" "090629-K1-1" "0.0744879" "2685" "200" "0.000372439" "200" "RF" "4" "5" "60" "136.9" "Book 8: April 2009-April 2010" "" "0" "1" "Pt" "091009-K1-1" "0.0621667" "1200" "74.6" "0.000310833" "200" "RF" "4" "5" "60" "134.2" "Book 6: March 2008-April 2009" "" "0" "1" "Pt" "080515-K1-1" "0.0244444" "4500" "110" "0.000122222" "200" "RF" "1" "5" "60" "138.9" "Book 6: March 2008-April 2009" "" "0" "2" "Pt" "060510-K2-1" "0.0265186" "4412" "117" "0.000353581" "75" "RF?" "3" "5" "80" "89" "" "" "0" "2" "Pt" "051114-K2-1" "0.07505" "2000" "150.1" "0.000555926" "135" "RF" "" "5" "80" "80" "" "" "0" "2" "Pt" "060426-K2-1" "0.0676692" "2527" "171" "0.000451128" "150" "RF" "3" "5" "80" "" "" "" "0" "2" "Pt" "060511-K2-2" "0.0631913" "2206" "139.4" "0.000421275" "150" "RF" "3" "5" "80" "89" "" "" "1" "2" "Pt" "060801-K2-1" "0.07" "2206" "154.3" "0.000466304" "150" "RF" "3" "5" "60" "89" "" "" "0" "2" "Pt" "070220-K2-1" "0.0462778" "1800" "83.3" "0.000308519" "150" "RF" "4" "5" "60" "89" "" "" "0" "2" "Pt" "070221-K2-2" "0.00325397" "3780" "12.3" "6.50794e-005" "50" "RF" "4" "5" "60" "89" "" "" "0" "2" "Pt" "070221-K2-3" "0.0255556" "1800" "46" "0.000255556" "100" "RF" "4" "5" "60" "89" "" "" "0" "2" "Pt" "070928-K2-1" "0.0608341" "2206" "134.2" "0.000405561" "150" "RF" "3" "5" "80" "91.6" "" "" "0" "2" "Pt" "071011-K2-1" "0.00566667" "5400" "30.6" "9.77011e-005" "58" "RF" "3" "5" "80" "88.2" "" "" "0" "2" "Pt" "081031-K2-1" "0.0988214" "1103" "109" "0.000658809" "150" "RF" "2" "5" "60" "" "" "" "0" "3" "Pt" "120812-K3-4" "0.125" "1000" "125" "0.000833333" "150" "DC" "2" "5" "40" "25" "homogenious center" "7.5" "0" "3" "Pt" "121115-K3-3" "0.1" "" "30" "0.00166667" "60" "DC" "1" "1" "40" "25" "homogenious center" "7.5" "0" "3" "Pt" "121116-K3-1" "0.288" "" "86.5" "0.0016" "180" "DC" "1" "" "40" "25" "homogenious center" "7.5" "0" "3" "Pt" "190718-K3-2" "0.156" "600" "94" "0.00078" "200" "DC (DCXS-1500)" "3" "1" "40" "25" "uniform rotation 100%; on 15 nm Ta" "7.5" "1" "2" "Re" "110110-K2-1" "0.067" "2700" "183" "0.000338889" "200" "RF" "" "1" "20" "91.6" "" "" "0" "1" "Re" "120201-K1-1" "0.0664" "2500" "166" "0.000332" "200" "RF" "6" "5" "60" "138.6" "" "" "0" "1" "Re" "120404-K1-1" "0.252" "500" "126" "0.00252" "100" "DC" "1" "2" "40" "" "Dec 2014 -" "" "0" "1" "Re" "120711-K1-2" "0.25" "500" "125" "0.0025" "100" "DC" "1" "2" "40" "" "" "" "0" "1" "Re" "120713-K1-1" "0.268" "500" "134" "0.00223333" "120" "DC" "1" "2" "40" "" "" "" "1" "1" "Re" "120730-K1-3" "0.353" "500" "176.3" "0.003526" "100" "DC" "3" "5" "60" "" "Dec. 2011 -" "" "1" "1" "Ru" "150326-K1-1" "0.427167" "600" "256.3" "0.0032859" "130" "DC" "3" "2" "40" "134" "" "" "0" "3" "Ru" "140913-K3-1" "0.03" "1800" "55" "0.000428571" "70" "DC" "1" "5" "40" "25" "homogenious center" "7" "0" "3" "Ru" "190718-K3-1" "0.177" "650" "115" "0.0007375" "240" "DCp (10kHz, 5)" "1" "1" "40" "25" "uniform rotation 100%; on 15 nm Ta" "7.5" "0" "1" "Si" "120321-K1-2" "0.16" "3600" "589" "0.00163611" "100" "DC (pulse)" "3" "5" "" "138.9" "" "" "0" "1" "Si" "120807-K1-1" "0.336" "1800" "605" "0.00168" "200" "pDC" "3" "5" "60" "138.9" "" "" "0" "1" "Si" "140623-K4-1" "0.282" "1200" "338" "0.00188" "150" "DC" "1" "5" "60" "134" "" "" "0" "1" "Si" "140827-K1-1" "0.208889" "1800" "376" "0.00224612" "93" "DC" "3" "5" "60" "134" "" "" "0" "1" "Si" "150601-K1-2" "0.3035" "2000" "607" "0.00202333" "150" "pDC" "3" "5" "60" "134" "" "" "1" "1" "Si" "160307-K1-1" "0.07315" "2500" "182.875" "0.001463" "50" "pDC" "3" "5" "60" "134" "" "" "1" "2" "Si" "061117-K2-1" "0.013" "900" "11.3" "0.000125556" "100" "RF" "4" "5" "60" "89" "" "" "0" "2" "Si" "061120-K2-1" "0.029" "1800" "52.3" "0.000145278" "200" "RF" "4" "5" "60" "89" "" "" "0" "2" "Si" "090529-K2-2" "0.013" "1500" "19" "8.44444e-005" "150" "RF" "" "5" "30" "80" "Ar-Flow-? WorkingDistance-?" "" "0" "2" "Si" "090603-K2-1" "0.118593" "2700" "320.2" "0.00047437" "250" "DC" "1" "5" "60" "91.6" "" "" "0" "2" "Si" "090604-K2-2" "0.108127" "1415" "153" "0.000482711" "224" "DC" "1" "5" "60" "91.6" "" "" "0" "2" "Si" "100408-K2-2" "0.104382" "1415" "147.7" "0.000465989" "224" "DC constant" "1" "5" "60" "91.6" "" "" "0" "2" "Si" "100408-K2-3" "0.102191" "1415" "144.6" "0.000456209" "224" "DC pulse" "1" "5" "60" "91.6" "" "" "0" "2" "Si" "110617-K2-1" "0.105" "1415" "148.2" "0.000467567" "224" "DC constant" "1" "5" "60" "91.6" "" "" "-1000" "1" "Sm2Co17" "060403-K1-1" "0.041" "3600" "147.6" "0.000205" "200" "RF" "4" "5" "60" "135" "" "" "-1000" "1" "SmCo5" "060717-K1-1" "0.023" "2400" "55.2" "0.000153333" "150" "RF" "4" "5" "60" "135" "" "" "-1000" "1" "SmCo5" "060719-K1-1" "0.01" "6120" "61.2" "0.0001" "100" "RF" "4" "5" "60" "135" "Book aktuell: Jan 2011- now" "" "-1000" "1" "Superalloy" "110315-K1-3" "0.648" "1800" "1166.4" "0.00324" "200" "" "1" "15" "100" "136.4" "Book aktuell: Jan 2011- now" "" "-1000" "1" "Superalloy" "110321-K1-2" "0.839" "180" "151.02" "0.00839" "100" "DC" "1" "5" "60" "185" "Book aktuell: Jan 2011- now" "" "-1000" "1" "Superalloy" "110407-K1-1" "0.0825" "1800" "148.5" "0.0004125" "200" "RF" "4" "5" "60" "136.4" "Book aktuell: Jan 2011- now" "" "-1000" "1" "Superalloy" "110408-K1-1" "0.198722" "1800" "357.7" "0.000993611" "200" "RF" "4" "5" "60" "185" "" "" "1" "1" "Ta" "080527-K1-01" "0.384" "900" "345.6" "0.00256" "150" "DC" "2" "5" "60" "138.9" "" "" "0" "1" "Ta" "080527-K1-1" "0.383556" "900" "345.2" "0.00255704" "150" "DC" "2" "5" "60" "138.9" "Book 6: March 2008-April 2009" "" "0" "1" "Ta" "090323-K1-02" "0.18" "900" "162" "0.0024" "75" "DC" "3" "5" "60" "134.4" "" "" "0" "1" "Ta" "090323-K1-2" "0.180222" "900" "162.2" "0.00180222" "100" "DC" "3" "5" "60" "134.4" "Book 6: March 2008-April 2009" "" "0" "1" "Ta" "090401-K1-01" "0.075" "1305" "97.875" "0.00234375" "32" "DC" "3" "5" "60" "134.4" "Book 10: April 2010-Jan 2011" "" "0" "1" "Ta" "090402-K1-1" "0.075249" "1305" "98.2" "0.00235153" "32" "DC" "3" "5" "20" "134.4" "" "" "0" "1" "Ta" "100712-K1-1" "0.0941111" "3600" "338.8" "0.000470556" "200" "RF" "6" "5" "60" "134.4" "Book 6: March 2008-April 2009" "" "0" "1" "Ta" "120206-K1-1" "0.0579167" "1800" "104.25" "0.000231667" "250" "RF" "4" "5" "60" "138.9" "" "" "0" "1" "Ta" "120206-K1-2" "0.0362222" "1800" "65.2" "0.000181111" "200" "RF" "4" "5" "60" "139.8" "" "" "0" "1" "Ta" "120322-K1-1" "0.516389" "3600" "1859" "0.00258194" "200" "DC" "1" "5" "60" "139.8" "" "" "0" "1" "Ta" "180713-K1-1" "0.0580664" "2500" "145.166" "0.000387109" "150" "RF" "6" "5" "60" "141" "" "" "0" "3" "Ta" "190715-K3-1" "0.165" "1800" "297" "0.000825" "200" "DC (DCXS-750)" "4" "5" "20" "25" "uniform rotation 100%; resist problems" "7.5" "0" "3" "Ta" "190717-K3-1" "0.167" "900" "150" "0.000835" "200" "DC (DCXS-750)" "4" "5" "20" "25" "uniform rotation 100%" "7.5" "0" "2" "Ta" "071112-K2-1" "0.0734259" "5400" "396.5" "0.00036713" "200" "RF" "1" "5" "60" "91.6" "" "" "0" "2" "Ta" "080328-K2-2" "0.0387963" "5400" "209.5" "0.000193981" "200" "RF" "1" "5" "60" "91.6" "Cathode tilt: 20mm" "" "1" "2" "Ta" "100907-K2-2" "0.0752778" "3600" "271" "0.000376389" "200" "RF" "4" "5" "60" "91.6" "" "" "0" "2" "Ta" "180216-K2-1" "0.035" "1800" "63" "0.000269" "130" "RF" "4" "5" "60" "91.6" "" "" "1" "2" "Ti" "060120-K2-1" "0.039" "2326" "91" "0.000195615" "200" "DC" "" "5" "80" "83" "" "" "0" "2" "Ti" "061012-K2-2" "0.081" "2128" "172.368" "0.00054" "150" "DC" "1" "1" "20" "89" "" "" "0" "2" "Ti" "061218-K2-2" "0.029" "3850" "112.2" "0.000145714" "200" "RF" "1" "5" "60" "89" "" "" "0" "2" "Ti" "070309-K2-1" "0.0263333" "1500" "39.5" "0.000131667" "200" "RF" "3" "1" "20" "89" "Pd-cap" "" "0" "2" "Ti" "071106-K2-1" "0.0276667" "1500" "41.5" "0.000138333" "200" "RF" "3" "5" "60" "91.6" "WorkingDistance-?" "" "0" "2" "Ti" "071108-K2-1" "0.00126389" "7200" "9.1" "2.52778e-005" "50" "RF" "3" "1" "20" "91.6" "" "" "0" "2" "Ti" "071113-K2-1" "0.127398" "5000" "636.99" "0.00063699" "200" "DC" "3" "5" "60" "91.6" "" "" "0" "2" "Ti" "080328-K2-1" "0.0484" "5000" "242" "0.000242" "200" "DC constant" "3" "5" "60" "91.6" "Cathode tilt: 20mm" "" "0" "2" "Ti" "091027-K2-1" "0.12" "3600" "432" "0.0006" "200" "DC constant" "4" "5" "60" "91.6" "WorkingDistance-?" "" "0" "2" "Ti" "110408-K2-1" "0.129653" "3600" "466.75" "0.000648264" "200" "DC constant" "2" "20" "80" "91.6" "Way too high?" "" "0" "2" "Ti" "110330-K1-1" "0.134" "5170" "694.2" "0.000671373" "200" "DC constant" "2" "20" "80" "91.6" "" "" "0" "1" "Ti" "090324-K1-?" "0.063" "1430" "90.09" "0.00126" "50" "DC" "1" "5" "60" "136.9" "" "" "0" "1" "Ti" "060608-K1-1" "0.29224" "1500" "438.36" "0.0014612" "200" "DC" "" "5" "60" "" "Book 2: Aug 2005- April 2006" "" "0" "1" "Ti" "121005-K1-1" "0.027" "" "" "" "250" "RF" "6" "5" "60" "" "Ti (almost used up); Book 8: April 2009-April 2010" "" "0" "3" "Ti" "120626-K3-2" "0.056" "" "100" "0.00028" "200" "DCp (0Hz)" "2" "20" "80" "25" "uniform" "7.5" "0" "3" "Ti" "140812-K3-3" "0.04333" "1800" "78" "0.000288867" "150" "DCp (0Hz)" "4" "10" "40" "25" "uniform" "7.5" "0" "3" "Ti" "211115-K3-1" "0.055" "2400" "132" "0.000366667" "150" "DCp (10kHz, 5µs)" "1" "5" "30" "25" "uniform rotation 75%" "7.5" "1" "1" "Ti" "050224-K1-02" "0.32" "1800" "576" "0.0016" "200" "DC" "2" "5" "60" "129.6" "" "" "0" "1" "Ti" "050224-K1-1" "0.333333" "1800" "600" "0.00167504" "199" "DC" "2" "4.97" "79.9" "129.64" "" "" "0" "1" "Ti" "060117-K1-1" "0.0166667" "1800" "30" "0.000111111" "150" "RF" "6" "2" "20" "136" "Book 2: Aug 2005- April 2006" "" "0" "1" "Ti" "060118-K1-1" "0.047619" "630" "30" "0.000238095" "200" "RF" "6" "5" "80" "129.6" "Book 1: June 2004- Aug 2005" "" "0" "1" "Ti" "071023-K1-1" "0.07" "1875" "131.25" "0.0014" "50" "DC" "2" "5" "60" "136.9" "" "" "0" "1" "Ti" "090324-K1-2" "0.0632867" "1430" "90.5" "0.00126573" "50" "DC" "1" "5" "60" "136.9" "Book 5: July 2007-March 2008" "" "0" "1" "Ti" "090527-K1-?" "0.276" "1800" "496.8" "0.00131429" "210" "DC" "1" "5" "60" "134.4" "" "" "0" "1" "Ti" "090527-K1-2" "0.276111" "1800" "497" "0.00131481" "210" "DC" "" "5" "60" "" "Book 8: April 2009-April 2010" "" "0" "1" "Ti" "090615-K1-?" "0.292" "1800" "525.6" "0.00139048" "210" "DC" "1" "5" "60" "134.4" "" "" "0" "1" "Ti" "090615-K1-1" "0.292222" "1800" "526" "0.00139153" "210" "DC" "" "5" "60" "134.4" "Book 6: March 2008-April 2009" "" "0" "1" "Ti" "100907-K1-?" "0.039" "2700" "105.3" "0.000195" "200" "RF" "6" "5" "60" "136.9" "" "" "0" "1" "Ti" "100907-K1-1" "0.039" "2700" "105.3" "0.000195" "200" "RF" "6" "5" "60" "136.9" "Book 10: April 2010-Jan 2011" "" "0" "1" "Ti" "101102-K1-?" "0.053" "7200" "381.6" "0.000212" "250" "RF" "6" "5" "60" "136.9" "Book aktuell: Jan 2011- now" "" "0" "1" "Ti" "101102-K1-2" "0.0529306" "7200" "381.1" "0.000211722" "250" "RF" "6" "5" "60" "136.9" "Book 10: April 2010-Jan 2011" "" "0" "1" "Ti" "101208-K1-1" "0.025" "400" "10" "0.000166667" "150" "DC" "6" "5" "60" "136.4" "Book 8: April 2009-April 2010" "" "0" "1" "Ti" "110328-K1-1" "0.15" "1800" "270" "0.0015" "100" "DC" "3" "2" "60" "134.4" "Book 10: April 2010-Jan 2011" "" "0" "1" "Ti" "120724-K1-1" "0.28" "1800" "500" "0.00186667" "150" "DC" "1" "5" "60" "138.9" "" "" "0" "1" "Ti" "121029-K1-1" "0.18" "500" "90" "0.0015" "120" "DC" "3" "2" "40" "" "" "" "0" "1" "Ti" "121029-K1-4" "0.275" "500" "138" "0.00171875" "160" "DC" "3" "2" "40" "" "Book: Dec2011 -" "" "0" "1" "Ti" "081031-K1-1" "0.326667" "1500" "490" "0.00163333" "200" "DC" "1" "5" "60" "134.4" "Book 6: March 2008-April 2009" "" "0" "1" "Ti" "101207-K1-1" "0.0527778" "1800" "95" "0.000211111" "250" "RF" "6" "5" "80" "136.4" "Book 10: April 2010-Jan 2011" "" "0" "2" "Ti" "150724-K2-1" "0.094" "1800" "169.1" "0.000469722" "200" "DC" "3" "5" "60" "91.6" "" "" "-1000" "3" "TiOx" "130710-K3-1" "0.013" "3600" "47.3" "3.25e-005" "400" "DCp (35kHz, 1.2)" "2" "2" "" "25" "homogenious center; thickness: low" "7.5" "-1000" "3" "TiOx" "130710-K3-2" "0.0119" "3600" "43" "2.975e-005" "400" "DCp (35kHz, 1.2)" "2" "5" "" "25" "homogenious center; thickness: low" "7.5" "-1000" "3" "TiOx" "130710-K3-3" "0.0097" "3600" "35" "2.425e-005" "400" "DCp (35kHz, 1.2)" "2" "10" "" "25" "homogenious center; thickness: very low" "7.5" "-1000" "3" "TiOx" "130711-K3-1" "0.0051" "3600" "18.4" "1.275e-005" "400" "DCp (35kHz, 1.2)" "2" "20" "" "25" "homogenious center; thickness: very low" "7.5" "-1000" "3" "TiOx" "130711-K3-2" "0.0044" "3600" "15.6" "1.1e-005" "400" "DCp (35kHz, 1.2)" "2" "30" "" "25" "homogenious center; thickness: very low" "7.5" "-1000" "3" "TiOx" "130725-K3-1" "0.0178" "3600" "64.3" "2.96667e-005" "600" "DCp (35kHz, 1.2)" "2" "2" "" "25" "homogenious center" "7.5" "-1000" "3" "TiOx" "130725-K3-2" "0.0181" "3600" "65.1" "3.01667e-005" "600" "DCp (35kHz, 1.2)" "2" "5" "" "25" "homogenious center" "7.5" "-1000" "3" "TiOx" "130726-K3-1" "0.0162" "3600" "58.4" "2.7e-005" "600" "DCp (35kHz, 1.2)" "2" "10" "" "25" "homogenious center" "7.5" "-1000" "3" "TiOx" "130726-K3-2" "0.0073" "3600" "26.2" "1.21667e-005" "600" "DCp (35kHz, 1.2)" "2" "20" "" "25" "homogenious center" "7.5" "-1000" "3" "TiOx" "130726-K3-3" "0.005" "3600" "18.1" "8.33333e-006" "600" "DCp (35kHz, 1.2)" "2" "30" "" "25" "homogenious center" "7.5" "-1000" "3" "TiOx" "131120-K3-4" "0.0114" "6000" "68.5" "2.53333e-005" "450" "RF" "2" "5" "" "25" "homogenious center" "7" "1" "1" "V" "100412-K1-1" "0.23" "2700" "621" "0.00115" "200" "DC" "3" "5" "60" "136.4" "Book 8: April 2009-April 2010" "" "0" "1" "V" "100412-K1-2" "0.09" "1800" "162" "0.0009" "100" "DC" "3" "5" "60" "136.4" "" "" "0" "2" "V" "180219-K2-1" "0.013" "1800" "23" "0.0001" "130" "RF" "1" "5" "60" "91.6" "" "" "0" "2" "V" "180221-K2-1" "0.084" "1800" "152" "0.000562" "150" "DC" "1" "5" "60" "91.6" "" "" "0" "2" "W" "090818-K2-1" "0.169167" "3600" "609" "0.000966667" "175" "DC constant" "4" "5" "60" "91.6" "" "" "0" "2" "W" "100108-K2-1" "0.0294805" "3850" "113.5" "0.00109187" "27" "DC" "5" "5" "60" "91.6" "" "" "0" "2" "W" "100914-K2-1" "0.190833" "3600" "687" "0.000954167" "200" "DC constant" "" "5" "60" "91.6" "" "" "1" "2" "W" "101018-K2-1" "0.190476" "840" "160" "0.000952381" "200" "DC" "5" "5" "60" "91.6" "" "" "0" "2" "W" "120201-K2-1" "0.003472" "7200" "25" "0.000115741" "30" "RF" "2" "5" "60" "91.6" "" "" "1" "1" "W" "090520-K1-?" "0.0569" "3600" "204.84" "0.0002845" "200" "RF" "5" "5" "60" "134.4" "" "" "0" "1" "W" "090702-K1-?" "0.109" "3600" "392.4" "0.000363333" "300" "RF" "5" "5" "60" "134.4" "Book 10: April 2010-Jan 2011" "" "0" "1" "W" "090702-K1-2" "0.109278" "3600" "393.4" "0.000364259" "300" "RF" "5" "5" "60" "134.4" "Book 8: April 2009-April 2010" "" "0" "1" "W" "090728-K1-1" "0.109167" "3600" "393" "0.000363889" "300" "RF" "5" "5" "60" "134.4" "" "" "0" "1" "W" "100714-K1-1" "0.09575" "3600" "344.7" "0.000348182" "275" "RF" "5" "5" "60" "134.4" "Book 8: April 2009-April 2010" "" "0" "1" "W" "121029-K1-2" "0.272" "500" "136" "0.00226667" "120" "DC" "1" "2" "40" "" "Book 3: April 2006-Jan 2007" "" "0" "3" "W" "110609-K3-1" "0.082" "" "220.9" "0.00082" "100" "DCp (0 Hz)" "2" "5" "30" "25" "" "7.5" "0" "3" "W" "110610-K3-1" "0.076" "" "205" "0.000304" "250" "RF" "3" "5" "30" "25" "" "7.5" "0" "3" "W" "110627-K3-1" "0.084" "" "203.9" "0.00084" "100" "DC" "" "5" "" "" "" "" "0" "3" "W" "111118-K3-3" "0.158" "" "283.5" "0.00105333" "150" "DC" "2" "10" "40" "25" "wedge (central point)" "7.5" "0" "3" "W" "111118-K3-4" "0.245" "" "441.5" "0.00098" "250" "DC" "2" "10" "40" "25" "wedge (central point)" "7.5" "0" "3" "W" "130703-K3-1" "0.082" "1800" "148" "0.00041" "200" "RF" "3" "5" "40" "25" "homogenious center" "7.5" "-1000" "3" "WOx" "130121-K3-1" "0.0174" "" "31.3" "8.7e-005" "200" "DCp (35kHz, 1.2)" "3" "20" "40" "25" "homogenious center" "7.5" "-1000" "3" "WOx" "130122-K3-2" "0.046" "" "82.85" "0.000115" "400" "DCp (35kHz, 1.2)" "3" "20" "40" "25" "homogenious center" "7.5" "-1000" "3" "WOx" "130607-K3-1" "0.022" "3600" "80" "8.8e-005" "250" "RF" "3" "2" "" "25" "homogenious center" "7.5" "-1000" "3" "WOx" "130610-K3-1" "0.0261" "3600" "94" "0.0001044" "250" "RF" "3" "5" "" "25" "homogenious center" "7.5" "-1000" "3" "WOx" "130610-K3-2" "0.0214" "3600" "76.3" "8.56e-005" "250" "RF" "3" "10" "" "25" "homogenious center" "7.5" "-1000" "3" "WOx" "130610-K3-3" "0.012" "3600" "42" "4.8e-005" "250" "RF" "3" "20" "" "25" "homogenious center; thickness: low" "7.5" "-1000" "3" "WOx" "130610-K3-4" "0.0081" "3600" "29" "3.24e-005" "250" "RF" "3" "30" "" "25" "homogenious center; thickness: very low" "7.5" "1" "2" "Y" "090916-K2-1" "0.0733333" "1800" "132" "0.000488889" "150" "RF" "2" "5" "60" "91.6" "" "" "-1000" "3" "ZnO" "130122-K3-1" "" "" "" "" "100" "RF" "2" "10" "40" "25" "homogenious center" "7.5" "-1000" "3" "ZnO" "130131-K3-1" "0.022" "3600" "158.9" "0.00022" "100" "RF" "2" "10" "40" "25" "homogenious center" "7.5" "1" "1" "Zr" "061229-K1-2" "0.0164056" "3600" "59.06" "0.000164056" "100" "RF" "4" "5" "60" "132" "Book 3: April 2006-Jan 2007" "" "0" "1" "Zr" "061229-K1-3" "0.0521667" "3600" "187.8" "0.000260833" "200" "RF" "4" "5" "60" "132" "" "" "0" "2" "Zr" "081117-K2-1" "0.0658056" "3600" "236.9" "0.000329028" "200" "RF" "4" "5" "60" "91.6" "" "" "1" "2" "Zr" "091119-K2-1" "0.0220556" "3600" "79.4" "0.000220556" "100" "RF" "4" "5" "60" "91.6" "" ""