_Template
Type: Sputter Rate show more
ObjectId: 6650
Created: 2/16/2023 11:35:06 AM by Vic) Victor Dudarev [vic.dudarev@gmail.com]
Updated: 5/22/2023 5:23:08 PM by Vic) Victor Dudarev [vic.dudarev@gmail.com]
Access: Public Sort Code (asc): -1
Description: Template for sputter rate (this is not sputter rate for Hydrogen)
[no file attached]
: H
All properties (except table), that define a template
No properties found
The table template
| Material | Trust | Deposition Date | Chamber | LogbookId | Rate, nm/sec | Time, sec | Thickness, nm | Normalized Rate, nm/W*sec | Power, W | Power Supply | Cathode | Pressure, mTorr | Argon Flow, sccm | Working Distance Cathode Tilt, mm | Working Distance Table Height, mm | Comment |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| String | Int | String | Int | String | Float | Float | Float | Float | Float | String | Int | Float | Float | Float | Float | String |