All sputter rates

Type: Sputter Rate

ObjectId: 6876

Created: 5/24/2023 10:21:11 AM by Vic) Victor Dudarev [vic.dudarev@gmail.com]

Updated: 5/24/2023 3:52:27 PM by Vic) Victor Dudarev [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

Description: All rates in one object (Stress Testing)

[no file attached]

: As-Ga

Associated Objects

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All properties (except table)

Include all template properties

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The table

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Trust Chamber Material LogbookId Rate, nm/sec Time, sec Thickness, nm Normalized Rate, nm/W*sec Power, W Power Supply Cathode Pressure, mTorr Argon Flow, sccm Working Distance Table Height, mm Comment Working Distance Cathode Tilt, mm
1 1 Ag 061228-K1-3 0.0950556 1800 171.1 0.000950556 100 RF 6 5 60 132 Book 3: April 2006-Jan 2007
0 1 Ag 061229-K1-1 0.348483 1800 627.27 0.00174242 200 RF 6 5 60 132 Book 3: April 2006-Jan 2007
0 1 Al 080319-K1-1 0.145 1800 261 0.000725 200 RF 6 5 60 138.9
0 1 Al 080424-K1-2 0.056 2700 151.2 0.000373333 150 RF 5 5 60 138.9
0 1 Al 080516-K1-3 0.0210741 2700 56.9 0.000351235 60 RF 5 5 60 138.9 Book 6: March 2008-April 2009
0 1 Al 080519-K1-2 0.0142083 12000 170.5 0.000236806 60 RF 5 5 60 138.9 Book 6: March 2008-April 2009
0 1 Al 080529-K1-1 0.0471111 5400 254.4 0.000336508 140 RF 5 5 60 138.9 Book 6: March 2008-April 2009
0 1 Al 100228-K1-1 0.058 2700 156.6 0.000386667 150 RF 5 5 60 136.4
0 1 Al 100315-K1-1 0.095 2700 256.5 0.00038 250 RF 5 5 60 136.4 Book 8: April 2009-April 2010
0 1 Al 100316-K1-1 0.056 2700 151.2 0.000224 250 RF 5 20 90 136.4 Book 8: April 2009-April 2010
0 1 Al 100408-K1-1 0.43 2700 1161 0.00215 200 DC 2 2 40 136.4 Book 8: April 2009-April 2010
0 1 Al 100423-K1-1 0.0623889 1800 112.3 0.00124778 50 DC 3 5 60 134.4 Book 8: April 2009-April 2010
0 1 Al 100714-K1-2 0.386709 3160 1222 0.00193354 200 3 5 60 136.4 Book 10: April 2010-Jan 2011
0 1 Al 100809-K1-1 0.073 3600 262.8 0.000292 250 RF 5 5 60 136.4 Book 10: April 2010-Jan 2011
0 1 Al 110228-K1-1 0.084 300 25.2 0.000336 250 RF 6 5 100 136.4 Book aktuell: Jan 2011- now
0 1 Al 110316-K1-2 0.012 1800 21.6 0.00024 50 RF 6 15 100 185 Book aktuell: Jan 2011- now
0 1 Al 110325-K1-2 0.0188 900 16.92 0.000376 50 RF 6 5 60 185 Book aktuell: Jan 2011- now
0 1 Al 110815-K1-2 0.391667 1800 705 0.00195833 200 DC 1 5 60 136.4 Book aktuell: Jan 2011- now
1 1 Al 120403-K1-1 0.906667 900 816 0.00453333 200 DC 3 2 40
0 1 Al 120404-K1-2 0.33 500 165 0.0033 100 DC 3 2 40
0 1 Al 120404-K1-4 0.254 500 127 0.003175 80 DC 3 2 40
0 1 Al 120405-K1-1 0.104167 1200 125 0.00260417 40 DC 3 2 40
0 1 Al 150209-K1-3 0.145625 2400 349.5 0.0005825 250 RF 5 5 60 134 01.02.2015
0 1 Al 150216-K1-2 0.0779628 3600 280.666 0.000433127 180 RF 5 5 60 134 01.02.2015
0 1 Al 150518-K1-2 0.219333 1500 329 0.00182778 120 RF 2 5 60 134
0 3 Al 111118-K3-5 0.028 49.5 0.00035 80 DC 3 10 40 25 wedge (central point) 7.5
0 3 Al 111118-K3-6 0.049 87.5 0.00035 140 DC 3 10 40 25 wedge (central point) 7.5
0 3 Al 121203-K3-1 0.012 65.5 0.0003 40 RF 1 30 25 homogenious center 7.5
0 3 Al 141024-K3-2 0.047 810 39 0.000313333 150 DC 3 5 40 25 homogenious center; Ambios inacurate ? 7.5
0 2 Al 100818-K2-1 0.06751 7273 491 0.0006751 100 DC 3 5 60 91.6 WorkingDistance?
0 2 Al 100818-K2-2 0.0677656 5460 370 0.000677656 100 DC 3 5 60 91.6 WorkingDistance?
0 2 Al 100818-K2-3 0.068623 2215 152 0.00068623 100 DC 3 5 60 91.6 WorkingDistance?
0 2 Al 101001-K2-1 0.0144444 7200 104 9.62963e-005 150 RF 3 2 20 91.6
0 2 Al 101007-K2-1 0.00606944 14400 87.4 0.000202315 30 RF 3 2 20 91.6
0 2 Al 101012-K2-1 0.0191667 7200 138 0.00027381 70 RF 3 2 20 91.6
0 2 Al 101012-K2-2 0.0348333 5400 188.1 0.000232222 150 RF 3 2 20 91.6
0 2 Al 101018-K2-3 0.0723333 3000 217 0.000361667 200 RF 3 2 20 91.6
0 2 Al 150805-K2-1 0.135 1500 202.4 0.000674667 200 DC 5 5 60 91.6
0 2 Al 151001-K2-1 0.048 3600 173.4 0.000240833 200 RF 1 5 60 91.6
0 2 Al 160428-K2-2 0.0889 1800 160 0.000593 150 DC 5 5 60 91.6
-1000 3 Al2O3 130806-K3-3 0.128 4028 515 0.000365714 350 RF 4 5 25 homogenious center 6
-1000 3 Al2O3 130806-K3-4 0 1800 0 200 RF 4 5 25 homogenious center; target poisoning 6
-1000 3 AlN 161121-K3-1 0.0128 7380 94.5 6.4e-005 200 DC5B 3 3.75 25 7.5
-1000 1 AlN 120723-K1-1 0.0083 3600 30 5.53333e-005 150 RF 5 5 60 138.9
-1000 1 AlN 120723-K1-2 0.0115741 10800 125 5.14403e-005 225 RF 5 5 60 138.9
0 1 Au 071107-K1-1 0.0735556 900 66.2 0.000735556 100 RF 6 5 60 136.9 Book 5: July 2007-March 2008
0 1 Au 101018-K1-1 0.032 900 28.8 0.00032 100 RF 4 5 60 134.4 Book 10: April 2010-Jan 2011
0 1 Au 101018-K1-2 0.193333 900 174 0.000773333 250 RF 4 5 60 134.4 Book 10: April 2010-Jan 2011
0 1 Au 110112-K1-2 0.193237 2070 400 0.000772947 250 RF 4 5 60 134.4 Book 10: April 2010-Jan 2011
1 1 Au 110309-K1-1 0.033 1800 59.4 0.00033 100 RF 4 5 60 136.4 Book aktuell: Jan 2011- now
0 3 Au 110524-K3-1 0.503 905.7 0.00335333 150 DC 2 5 30 25 uniform 7.5
1 2 Au 090723-K2-1 0.203333 1800 366 0.00135556 150 RF 2 5 60 91.6
0 2 Au 100601-K2-1 0.2092 2000 418.4 0.00139467 150 RF 2 5 60 91.6
0 2 Au 130310-K2-1 0.132 1800 238 0.00188889 70 DC 5 5 60 91.6 measured with thin film ID (EDX)
0 2 B 070822-K2-1 0.00334722 7200 24.1 1.67361e-005 200 RF 4 5 60 91.6
0 2 B 070822-K2-2 0.00398056 7200 28.66 1.99028e-005 200 RF 4 1 20 91.6
0 2 B 070823-K2-1 0.00514861 7200 37.07 1.7162e-005 300 RF 4 5 60 91.6
0 2 B 090318-K2-1 0.003 7200 21.6 1e-005 300 RF 5 60 91.6
0 2 B 101005-K2-1 0.008 7200 57.6 2.66667e-005 300 RF 4 2 20 91.6
0 2 B 101007-K2-2 0.00821528 14400 118.3 2.73843e-005 300 RF 4 2 20 91.6 W-cap
0 2 B 130917-K2-1 0.0542 21600 117 1.80556e-005 300 RF 1 2 30 91.6 ambios
1 1 B 080325-K1-1 0.0045 5400 24.3 1.8e-005 250 RF 5 5 60 136.9
-1 1 B 080327-K1-1 0.00782407 5400 42.25 3.12963e-005 250 RF 5 5 60 166.9 Book 6: March 2008-April 2009
0 1 B 081222-K1-1 0.00246296 10800 26.6 9.85185e-006 250 RF 5 5 60 134.2 Book 6: March 2008-April 2009
0 1 B 090317-K1-1 0.00217593 21600 47 8.7037e-006 250 RF 5 4.98 60.1 134.2 Book 6: March 2008-April 2009
1 1 B 060310-K1-1 0.00408998 9780 40 2.72665e-005 150 RF 5 2 20 135 Book 2: Aug 2005- April 2006
0 1 B 060313-K1-1 0.00388889 7200 28 2.59259e-005 150 RF 5 1 20 135 Book 2: Aug 2005- April 2006
0 1 Co 050323-K1-? 0.21 1800 378 0.00105 200 DC 1 5 60 131.2
0 1 Co 050323-K1-1 0.411667 1800 741 0.00205833 200 RF 1 5 80 Book 1: June 2004- Aug 2005
0 1 Co 080417-K1-? 0.055 900 49.5 0.000275 200 RF 6 5 60 138.9
0 1 Co 080417-K1-2 0.0549451 3640 200 0.000274725 200 RF 6 5 60 138.9 Book 6: March 2008-April 2009
0 1 Co 080424-K1-? 0.063 7200 453.6 0.000252 250 RF 6 5 60 138.9
0 1 Co 080424-K1-1 0.0626389 7200 451 0.000250556 250 RF 6 5 60 138.9 Book 6: March 2008-April 2009
0 1 Co 121029-K1-3 0.273 500 137 0.002275 120 DC 2 2 40
0 1 Co 150518-K1-1 0.35625 1200 427.5 0.002375 150 DC 1 5 60 134
1 1 Co 120914-K1-1 0.11165 80 DC 2 5 60 138.4 Co (new target); Book: Dec2011 -
0 2 Co 151019-K2-1 0.077 2000 154.9 0.000103 75 DC 3 5 60 91.6
0 2 Co 070124-K2-1 0.0711698 2650 188.6 0.000284679 250 RF 3 5 60 89
0 2 Co 070124-K2-2 0.0891943 2110 188.2 0.000297314 300 RF 3 5 60 89
0 2 Co 070125-K2-1 0.0516497 2455 126.8 0.000258248 200 RF 3 5 60 89
0 2 Co 070618-K2-1 0.0781421 1830 143 0.000294876 265 RF 3 5 60 91.6 Wafer not positioned 100% correctly
0 2 Co 111219-K2-1 0.034 10000 340 0.000226667 150 RF 1 5 60 91.6
1 2 Co 120209-K2-1 0.07656 3200 210 0.00024858 264 RF 1 5 60 91.6
0 2 Co 150714-K2-1 0.0246 3600 88.7 0.000218043 113 RF 5 60 91.6
0 3 Co 110608-K3-2 0.136 367.5 0.00068 200 DC 5 30 25 7.5
0 3 Cr 121115-K3-1 0.14 42 0.000933333 150 DC 3 1 40 25 homogenious center 7.5
0 3 Cr 121128-K3-6 0.039 208 0.000975 40 DC 3 40 25 homogenious center 7.5
0 1 Cr 060927-K1-3 0.09264 2500 231.6 0.000430884 215 RF 6 5 60 135 Book 3: April 2006-Jan 2007
0 1 Cr 061103-K1-1 0.0635 1800 114.3 0.0003175 200 5 60 132
0 1 Cr 080411-K1-1 0.709 900 638.1 0.003545 200 DC 1 5 60 138.9 Book 6: March 2008-April 2009
0 1 Cr 080411-K1-2 0.705882 425 300 0.00352941 200 DC 1 5 60 138.9 Book 3: April 2006-Jan 2007
0 1 Cr 100118-K1-1 0.662333 900 596.1 0.00331167 200 DC 1 5 60 138.9 Book 6: March 2008-April 2009
0 1 Cr 100804-K1-1 0.0605 1800 108.9 0.000242 250 RF 4 5 60 134.4 Book 10: April 2010-Jan 2011
0 1 Cr 101014-K1-2 0.0804259 5400 434.3 0.000374074 215 RF 5 5 60 134.4 Book 8: April 2009-April 2010
0 1 Cr 110302-K1-1 0.025 1800 45 0.00025 100 RF 5 5 60 136.4 Book aktuell: Jan 2011- now
0 1 Cr 110302-K1-2 0.081 1800 145.8 0.000405 200 RF 5 5 60 136.4 Book aktuell: Jan 2011- now
0 1 Cr 110316-K1-3 0.055 1800 99 0.00055 100 RF 5 15 100 185 Book 10: April 2010-Jan 2011
0 1 Cr 120710-K1-2 0.292 500 146 0.00365 80 DC 3 2 40
0 1 Cr 120711-K1-1 0.248 500 124 0.00354286 70 DC 3 2 40
1 2 Cr 060118-K2-2 0.118 2041 240 0.00117589 100 DC 4 2 20 83
0 2 Cr 090529-K2-1 0.164 900 148 0.0010963 150 DC 5 30 80 Ar-Flow-? WorkingDistance-?
0 2 Cr 090603-K2-2 0.089 1200 106.8 0.000356 250 RF 3 5 60 91.6
0 2 Cr 090604-K2-1 0.0582727 2200 128.2 0.000306699 190 RF 3 5 60 91.6
0 2 Cr 100408-K2-1 0.0540455 2200 118.9 0.00028445 190 RF 3 5 60 91.6
0 2 Cr 100526-K2-1 0.071 3600 255.6 0.000373684 190 RF 3 5 60 91.6
0 2 Cr 110616-K2-1 0.081 1200 97.5 0.000325 250 RF 3 5 60 91.6
1 2 Cu 050216-K2 0.18 2900 517 0.00178276 100 DC 5 2 30 80
0 2 Cu 091029-K2 0.097 1800 174.6 0.000646667 150 RF 2 5 60
0 2 Cu 120726-K2-1 0.052 1800 150 RF 3 5 60 91.6
0 1 Cu 101230-K1-1 1.29 2400 3096 0.00516 250 DC 2 5 60 134.4 Book 8: April 2009-April 2010
0 1 Cu 110225-K1-1 0.389 2700 1050.3 0.00389 100 DC 2 5 60 136.4 Book aktuell: Jan 2011- now
0 1 Cu 110311-K1-2 0.166 2700 448.2 0.00332 50 DC 2 5 60 136.4 Book aktuell: Jan 2011- now
0 1 Cu 110311-K1-3 0.268 1800 482.4 0.00357333 75 DC 2 5 60 136.4 Book aktuell: Jan 2011- now
0 1 Cu 110315-K1-2 0.225 1800 405 0.00394737 57 DC 2 5 60 136.4 Book aktuell: Jan 2011- now
0 1 Cu 110316-K1-1 0.205 1800 369 0.00372727 55 DC 2 5 60 136.4 Book aktuell: Jan 2011- now
0 1 Cu 110318-K1-1 0.388462 1300 505 0.00388462 100 DC 2 5 60 136.4 Book aktuell: Jan 2011- now
0 1 Cu 110325-K1-1 0.0829 900 74.61 0.000829 100 RF 5 5 60 185 Book 10: April 2010-Jan 2011
0 1 Cu 120102-K1-1 0.031 2145 67.2 0.000391608 80 RF 5 5 60 136.9
1 1 Cu 050224-K1-? 0.21 1800 378 0.0007 300 RF 5 5 60 129.6 Book aktuell: Jan 2011- now
0 1 Cu 100412-K1-3 0.11 1800 198 0.000733333 150 RF 5 5 60 136.4
0 3 Cu 121115-K3-2 0.2 121 0.002 100 DC(p) (0kHz) 2 1 40 25 homogenious center 7.5
0 3 Cu 211107-K3-1 0.088 1800 157.6 0.000586667 150 DC (DCXS-1500) 2 5 30 25 uniform rotation 75%; on 15 nm Ti 7.5
0 3 Fe 111118-K3-1 0.052 47 0.00052 100 DC 4 10 40 25 wedge (central point) 7.5
0 3 Fe 111118-K3-2 0.092 83 0.000613333 150 DC 4 10 40 25 wedge (central point) 7.5
0 3 Fe 120704-K3-2 41 50 RF 4 1 35 25 end-to-end 7.5
0 3 Fe 150522-K3-1 0.142 1200 171 0.000946667 150 DC 4 3.75 40 25 homogenious center 7.5
0 1 Fe 050224-K1-2 0.302778 1800 545 0.00203207 149 DC 3 5 80 129.6 Book 1: June 2004- Aug 2005
0 1 Fe 050224-K1-3 0.29 1800 522 0.00193333 150 DC 3 5 60 129.6
0 1 Fe 050322-K1-1 0.6575 1200 789 0.00219167 300 RF 3 5 80 131.2 Book 1: June 2004- Aug 2005
0 1 Fe 050418-K1-1 0.6 684 410.4 0.002 300 DC 3 5 60 131.2
0 1 Fe 050421-K1-1 0.58 334 193.72 0.00193333 300 DC 5 60 131.2
0 1 Fe 060420-K1-1 0.176375 3600 634.95 0.00176375 100 DC 5 60 Book 1: June 2004- Aug 2005
0 1 Fe 060509-K2-1 0.0449683 2206 99.2 0.000899365 50 4 20 80 89 Book 3: April 2006-Jan 2007
0 1 Fe 060927-K1-1 0.25 900 225 0.00166667 150 DC 1 5 60 135
0 1 Fe 070115-K1-1 0.105444 1800 189.8 0.000527222 200 RF 4 5 60 135 Book 2: Aug 2005- April 2006
0 1 Fe 070418-K1-2 0.193333 900 174 0.00193333 100 5 60 Book 3: April 2006-Jan 2007
0 1 Fe 080516-K1-1 0.16 1000 160 0.00216216 74 DC 2 5 60 136.9
0 1 Fe 081223-K1-1 0.15 1800 270 0.00202703 74 DC 3 5 60 134.2 Book 8: April 2009-April 2010
0 1 Fe 090612-K1-2 0.0208333 1200 25 0.000138889 150 DC 3 5 60 Book 8: April 2009-April 2010
0 1 Fe 090618-K1-1 0.0511111 3600 184 0.000205266 249 DC 3 5.02 60 134.2 Book 8: April 2009-April 2010
0 1 Fe 090708-K1-3 0.16 1000 160 0.00064257 249 DC 3 4.95 60.1 Book 8: April 2009-April 2010
0 1 Fe 090805-K1-2 0.0565 2000 113 0.000226908 249 DC 3 4.96 60.1 134.2 Book 8: April 2009-April 2010
0 1 Fe 090806-K1-1 0.052 2000 104 0.000208835 249 DC 3 4.99 60.2 134.2 Book 8: April 2009-April 2010
0 1 Fe 090817-K1-1 0.0685 2000 137 0.0017125 40 DC 4 5.05 60.1 134.2 Book 8: April 2009-April 2010
0 1 Fe 090817-K1-2 0.0169323 4016 68 6.77291e-005 250 DC 3 5.02 60.1 134.2 Book 6: March 2008-April 2009
0 1 Fe 140826-K1-2 0.0527778 1800 95 0.00175926 30 DC 2 5 60 134
0 1 Fe 150601-K1-1 0.353333 1500 530 0.00235556 150 DC 1 5 60 134
1 1 Fe 120913-K1-1 0.13 1000 130 100 DC1 1 5 60 138.4 Fe (new thin target); Book :Nov 2012
0 2 Fe 051111-K2-1 0.12145 2000 242.9 0.000809667 150 DC 5 5 80 80
0 2 Fe 060420-K2-1 0.128052 2310 295.8 0.00085368 150 DC 4 5 80 83
0 2 Fe 060426-K2-2 0.137916 1171 161.5 0.000919442 150 DC 4 5 80 89
0 2 Fe 060508-K2-1 0.0703536 2206 155.2 0.000847634 83 DC? 4 5 80 89
0 2 Fe 060508-K2-2 0.065 2206 142.65 0.000862194 75 DC 4 5 80 89
0 2 Fe 060731-K2-1 0.0384523 1667 64.1 0.000384523 100 DC 5 5 60 89
0 2 Fe 061214-K2-1 0.0845831 1667 141 0.000845831 100 DC 5 5 60 89 Pd-cap
0 2 Fe 070111-K2-1 0.199867 1500 299.8 0.000999333 200 DC 5 5 60 89
0 2 Fe 070116-K2-1 0.0741333 1500 111.2 0.00148267 50 DC 5 5 60 89 O2-Leak suspected
0 2 Fe 070130-K2-1 0.0208286 3500 72.9 0.000694286 30 DC 5 5 60 89
0 2 Fe 070212-K2-1 0.0864 2000 172.8 0.000864 100 DC 5 5 60 89 Pd-cap, (hc target holes + slots -> plug cut out for AES)
0 2 Fe 070622-K2-1 0.0183889 3600 66.2 0.000245185 75 DC 5 5 60 91.6
0 2 Fe 071001-K2-1 0.0564134 2830 159.65 0.000696462 81 DC 5 5 80 91.6 Pt cap
0 2 Fe 071008-K2-1 0.0168644 6742 113.7 0.000496013 34 DC 5 5 80 91.6 Pt cap; Catode-?
0 2 Fe 071009-K2-1 0.0156984 6300 98.9 0.000461718 34 DC 5 5 80 88.2 Pt cap; Catode-?
0 2 Fe 071010-K2-2 0.0166825 6300 105.1 0.000490663 34 DC 5 5 80 78.2 Pt cap
0 2 Fe 090323-K2-1 0.016 5490 87.84 0.000533333 30 DC 5 30 80 Ar-Flow-? WorkingDistance-?
0 2 Fe 091021-K2-3 0.122 500 61 0.000813333 150 DC 4 5 60 91.6 Catode-?
0 2 Fe 110302-K2-1 0
0 2 Fe 120208-K2-2 0.0433 6000 234 0.00065 60 DC 3 5 60 91.6 NEW TARGET
0 2 Fe 170712-K2 69500 100 DC Fe target (slots) lifetime; Power - ? 8380 sec preclean
1 2 Fe 141003-K2-1 0.075 1400 105 DC3_RF4 2 30 91.6 FeCo (Fe _new target - Co target
0 2 Fe 060711-K2-1 0.104815 1163 121.9 0.000698768 150 DC 4 5 60 89 Fe-hc; plasma flickering
-1000 1 FeCo 060109-K1-1 0.09 900 81 0.0018 50 DC 1 5 60 136
-1000 1 FeCo 070509-K1-1 0.2 900 180 0.002 100 DC 2 5 60 139.3
-1000 1 FeCo 070823-K1-2 0.205 1000 205 0.00205 100 DC 2 5 60 135
-1000 1 FeCo 120910-K1-1 0.203 1000 203 0.00203 100 DC 2 5 60 138.9
-1000 1 FeCo 121128-K1-1 0.05875 4000 235 0.00195833 30 DC 2 5 60 138.9 Book : Dec 2011- Okt 2011
-1000 1 FeCo 121129-K1-1 0.0863 3000 259 0.00205556 42 DC 2 5 60 138.9 Book :Nov 2012
-1000 1 FeCoV 050330-K1-1 0.45 1800 810 0.00225 200 DC 1 5 60 131.2
0 1 Gd 150518-K1-5 0.2056 2500 514 0.00137067 150 RF 5 5 60 134
0 2 Gd 140107-K2-1 0.195 1200 234 0.00195 100 DC 5 5 60 91.6
0 2 Ge 160108-K2-1 0.121 1800 218 0.000603 200 RF 1 5 60 91.6
0 2 Ge 160114-K2-1 0.016 5400 88 0.000273 60 RF 1 5 60 91.6
0 1 Ge 140826-K1-1 0.138889 1800 250 0.000555556 250 RF 6 5 60 134
0 1 Ge 150518-K1-3 0.084375 2400 202.5 0.0003375 250 RF 4 5 60 134
0 1 Ge 160128-K1-1 0.0381111 1800 68.6 0.000254074 150 RF 4 5 60 134
1 1 Hf 061128-K1-1 0.042 1800 75.6 0.00042 100 RF 5 5 60 132
0 1 Hf 061129-K1-1 0.106 1800 190.8 0.00053 200 RF 5 5 60 132 Book 3: April 2006-Jan 2007
0 2 Hf 071112-K2-3 0.0959722 3600 345.5 0.000479861 200 RF 5 5 60 91.6
0 2 Mg 051026-K2-1 0.343889 1800 619 0.00171944 200 RF 1 1 20 80
1 2 Mg 060117-K2-2 0.14 1800 257.4 0.00143 100 RF 1 1 20 83
0 2 Mg 060118-K2-1 0.146853 715 105 0.00146853 100 RF 1 20 83
0 2 Mg 060321-K2-1 0.137754 690 95.05 0.00137754 100 RF 1 1 40 83
0 2 Mg 060322-K2-1 0.126501 3450 436.43 0.00126501 100 RF 1 1 20 83
0 2 Mg 060628-K2-1 0.14 1470 205.8 0.0014 100 RF 1 1 20 89
0 2 Mg 061012-K2-1 0.139 1470 204.6 0.00139184 100 RF 3 1 20 89
0 2 Mg 070306-K2-1 0.0616333 1500 92.45 0.00123267 50 RF 1 1 20 89 Pd-cap
0 2 Mg 070824-K2-1 0.01251 6000 75.06 0.0005004 25 RF 1 5 60 91.6
0 2 Mg 080214-K2-2 0.0689583 1440 99.3 0.000689583 100 RF 1 5 60 91.6 Pd cap
0 2 Mg 100727-K2-1 0.130435 690 90 0.00130435 100 RF 1 1 20 91.6 Pd-cap
0 2 Mg 100930-K2-1 0.0430833 3600 155.1 0.000861667 50 RF 1 2 20 91.6 W-cap
0 2 Mg 101001-K2-2 0.0190556 5400 102.9 0.000635185 30 RF 1 2 20 91.6 W-cap
0 2 Mg 101001-K2-3 0.0190556 7200 137.2 0.000635185 30 RF 1 2 20 91.6 W-cap
0 2 Mg 101002-K2-1 0.0110278 10800 119.1 0.000551389 20 RF 1 2 20 91.6 W-cap
0 2 Mg 101013-K2-1 0.0508333 3600 183 0.00072619 70 RF 1 2 20 91.6 W-cap
0 2 Mg 101013-K2-2 0.0979444 1800 176.3 0.000816204 120 RF 1 2 20 91.6 W-cap
0 2 Mg 101015-K2-2 0.0231852 5400 125.2 0.00057963 40 RF 1 2 20 91.6 W-cap
0 2 Mg 101018-K2-2 0.16 1000 160 0.0008 200 RF 1 2 20 91.6 W-cap
0 2 Mg 110411-K2-1 0.127 1430 182.2 0.000637063 200 RF 5 5 60 91.6 Mg-Rate+Ti Cap
0 3 Mg 120625-K3-2 0.047 85 0.00094 50 DC 2 10 40 25 uniform 7.5
0 3 Mg 120626-K3-1 0.103 185 0.000686667 150 RF 2 10 40 25 uniform 7.5
-1000 2 MgB2 070518-K2-2 0.027 1800 48.6 9e-005 300 RF 1 20 91.6
-1000 2 MgB2 070521-K2 0.046 1800 82.8 0.00023 200 DC 1 20 91.6
-1000 2 MgB2 100727-K2-2 0.00962963 5400 52 0.000196523 49 DC pulse 5 1 20 91.6
-1000 2 MgB2 101102-K2-1 0.0129167 7200 93 0.000187198 69 DC pulse 2 2 20 91.6
-1000 2 MgB2 101102-K2-2 0.00861111 10800 93 0.000172222 50 DC pulse 2 2 20 91.6
0 2 Mn 070124-K2-3 0.084 2650 222.6 0.000409756 205 RF 1 5 60 89 Pd-cap
0 2 Mn 070124-K2-4 0.104171 2110 219.8 0.000416682 250 RF 1 5 60 89 Pd-cap
0 2 Mn 070125-K2-2 0.0538942 2080 112.1 0.000359295 150 RF 1 5 60 89
1 2 Mn 070618-K2-2 0.0826452 1550 128.1 0.000367312 225 RF 4 5 60 91.6 Pd-cap
0 2 Mn 140710-K2-4 0.051 2800 143 0.0003405 150 RF 5 5 60 91.6
0 1 Mn 090928-K1-? 0.0666 3600 239.76 0.000222 300 RF 2 5 60 134.4 Book 8: April 2009-April 2010
0 1 Mn 090928-K1-1 0.0388333 3600 139.8 0.000194167 200 RF 4 5 60 134.4 Book 8: April 2009-April 2010
0 1 Mn 090928-K1-2 0.0666111 3600 239.8 0.000222037 300 RF 4 5 60 134.4
1 1 Mn 160126-K1-2 0.1235 2000 247 0.0006175 200 RF 6 5 60 134
1 1 Mo 100410-K1-? 0.024 2700 64.8 8e-005 300 RF 2 5 60 134.4 Book 8: April 2009-April 2010
0 1 Mo 100419-K1-1 0.023963 2700 64.7 0.000119815 200 RF 4 5 60 134.4 Book 8: April 2009-April 2010
0 1 Mo 100427-K1-1 0.0556296 2700 150.2 0.000185432 300 RF 4 5 60 134.4 book Jan 2014
0 2 Mo 100525-K2-1 0.06975 3600 251.1 0.00034875 200 RF 1 5 60 91.6
0 2 Mo 100526-K2-3 0.285556 3600 1028 0.00142778 200 DC constant 1 5 60 91.6
0 2 Nb 071112-K2-2 0.0490833 3600 176.7 0.000245417 200 RF 4 5 60 91.6
0 2 Nb 081118-K2-2 0.0150833 3600 54.3 0.000150833 100 RF 1 5 60 91.6
0 2 Nb 100526-K2-2 0.134333 3600 483.6 0.000895556 150 DC constant 4 5 60 91.6
0 2 Nb 100614-K2-2 0.283 2700 764.1 0.001132 250 DC constant 4 5 60 91.6
1 2 Nb 100906-K2-1 0.0592593 5400 320 0.000296296 200 RF 2 5 60 91.6 single crystal target
0 2 Nb 180220-K2-1 0.182 1800 328 0.00122 150 DC 5 5 60 91.6
0 1 Nb 090323-K1-1 0.175139 1800 315.25 0.00175139 100 DC 2 5 60 134.4 Book 6: March 2008-April 2009
0 1 Nb 090401-K1-1 0.0698333 1800 125.7 0.00155185 45 DC 2 5 60 134.4
0 1 Nb 100713-K1-2 0.023 3600 82.8 0.000115 200 RF 4 5 60 134.4 Book 10: April 2010-Jan 2011
0 1 Nb 100715-K1-1 0.0448333 5400 242.1 0.000149444 300 RF 4 5 60 134.4 Book 10: April 2010-Jan 2011
0 1 Nb 100914-K1-1 0.0957407 5400 517 0.000319136 300 RF 5 5 60 134.4 Book 10: April 2010-Jan 2011
0 1 Nb 100929-K1-1 0.319 1800 574.2 0.00212667 150 DC 2 5 60 134.4 Book 10: April 2010-Jan 2011
0 1 Nb 100929-K1-2 0.319 1800 574.2 0.00212667 150 DC 2 5 60 134.4 Book 10: April 2010-Jan 2011
0 1 Nb 101028-K1-1 0.303586 1255 381 0.0020239 150 DC 3 5.1 60 134.4 Book 6: March 2008-April 2009
0 1 Nb 120320-K1-1 0.0154167 3600 55.5 0.000102778 150 RF 4 5 60 138.9
0 1 Nb 120320-K1-2 0.0351944 3600 126.7 0.000175972 200 RF 4 5 60 138.9
0 1 Nb 120321-K1-1 0.0514167 3600 185.1 0.000205667 250 RF 4 5 60 138.9
0 1 Nb 120913-K1-3 0.106667 1500 160 250 RF 6 5 60
0 1 Nb 121212-K1-3 0.23 1200 276 120 DC 2 5 60 138.9
1 1 Nb 140902-K1-3 0.0372 1800 67 0.000148889 250 RF 1 5 60 Book: November 2012 -
-1000 1 Nd2Fe14B 180418-K1-1 0.149222 1800 268.6 0.00149222 100 DC 1 5 60 141
1 1 Ni 050502-K1-1 0.49 1800 882 0.00245 200 DC 2 5 60 131.2
0 1 Ni 090527-K1-1 0.1817 1800 327.06 0.00242267 75 DC 2 5 60 134.2 Book aktuell: Jan 2011- now
0 1 Ni 090616-K1-1 0.177778 1800 320 0.00237037 75 DC 2 5 60 134.4 Book 6: March 2008-April 2009
0 1 Ni 110127-K1-2 0.223 1800 401.2 0.00297333 75 DC 1 1 20 185 Book aktuell: Jan 2011- now
0 1 Ni 110127-K1-3 0.372 600 223 0.00371667 100 DC 1 1 20 185 Book aktuell: Jan 2011- now
0 1 Ni 110127-K1-4 0.411 450 184.8 0.00548 75 DC 1 1 20 185 Book aktuell: Jan 2011- now
0 1 Ni 110405-K1-1 0.2215 1800 398.7 0.002215 100 DC 1 5 60 136.4
0 1 Ni 110412-K1-1 0.323 900 290.7 0.00538333 60 DC 1 5 60 185 Book 8: April 2009-April 2010
0 1 Ni 120202-K1-1 0.0792 2500 198 0.00198 40 DC 2 5 60 138.9
0 1 Ni 120404-K1-3 0.248 500 124 0.00248 100 DC 2 2 40
0 1 Ni 120709-K1-1 0.252 500 126 0.00252 100 DC 2 2 40 138.1 Book aktuell: Jan 2011- now
1 1 Ni 120730-K1-1 0.183 1800 330 0.00244 75 DC 2 5 60
0 2 Ni 091103-K2-1 0.061 1800 109.8 0.000305 200 RF 1 5 60
0 2 Ni 100412-K2-2 0.052 1800 93.6 0.00026 200 RF 1 5 60
0 2 Ni 100825-K2-1 0.0585122 6614 387 0.000292561 200 RF 1 5 60 91.6
0 2 Ni 100825-K2-2 0.0573756 5769 331 0.000286878 200 RF 1 5 60
0 2 Ni 100826-K2-1 0.0540984 2440 132 0.000270492 200 RF 1 5 60
0 2 Ni 140424-K2-1 0.06 1800 108 0.0003 200 RF 1 5 60 91.6
0 2 Ni 150806-K2-1 0.099 1500 148 0.0010963 90 DC 1 5 60 91.6
0 2 Ni 151020-K2-1 0.054 1800 98.8 0.00031 177 RF 1 5 60 91.6
0 1 Ni 060608-K1-2 0.104944 3600 377.8 0.00209889 50 DC 5 60 144 Book 1: June 2004- Aug 2005; Distance-?
1 2 Ni 050302-K2 0.04 1800 72 0.000266667 150 RF 5 80 80.3
1 2 Pd 050406-K2-1 0.13 3600 455.6 0.000843704 150 RF 2 2 80 80.3
0 2 Pd 060121-K2-1 0.102 2000 204 0.00051 200 RF 20 80 83
0 2 Pd 060321-K2-2 0.294748 119 35.075 0.000982493 300 RF 2 1 20 83
0 2 Pd 060322-K2-2 0.276875 400 110.75 0.000922917 300 RF 2 1 20 83
0 2 Pd 060614-K2-2 0.103 1000 103 0.000515 200 RF 2 20 80 89 with Fe-adhesion layer
0 2 Pd 060712-K2-1 0.250909 935 234.6 0.00135627 185 RF 2 5 60 89 mostly peeled
0 2 Pd 061221-K2-1 0.186 1000 185.6 0.000928 200 RF 2 5 60 89
0 2 Pd 061222-K2-1 0.143 1000 143 0.000959732 149 RF 2 5 60 89
0 2 Pd 061227-K2-1 0.094 1500 141 0.000895238 105 RF 2 5 60 89 Ti adhesion layer
0 2 Pd 070111-K2-2 0.03575 2000 71.5 0.000715 50 RF 2 5 60 89
0 2 Pd 080121-K2-1 0.297143 350 104 0.000990476 300 RF 2 1 20 91.6
0 2 Pd 090420-K2-1 0.0675 2000 135 0.000675 100 RF 2 5 60 91.6
0 2 Pd 090420-K2-2 0.0595 2000 119 0.000661111 90 RF 2 5 60 91.6
0 2 Pd 090420-K2-3 0.0475 2000 95 0.000601266 79 RF 2 5 60 91.6
0 2 Pd 091027-K2-3 0.106 700 74.2 0.000706667 150 RF 5 5 60
0 2 Pd 110202-K2-4 0.0865 1000 86.5 0.000576667 150 RF 5 20 80 91.6
0 1 Pd 060407-K1-1 0.0740741 2700 200 0.00148148 50 DC 2 60
0 1 Pd 080410-K1-1 0.151 900 135.9 0.00100667 150 RF 6 5 60 138.9
0 1 Pd 080416-K1-1 0.608 900 547.2 0.00608 100 DC 1 5 60 138.9
0 1 Pd 080416-K1-2 0.289167 360 104.1 0.00578333 50 RF 1 5 60 138.9 Book 6: March 2008-April 2009
1 1 Pd 080516-K1-2 0.105 1200 126 0.0075 14 DC 1 5 60 136.9
0 1 Pd 090316-K1-2 0.207 1000 207 0.00115 180 RF 6 4.99 60 134.2 Book 6: March 2008-April 2009
0 1 Pd 090316-K1-4 0.071 1000 71 0.000645455 110 RF 6 5 60.1 134.2 Book 6: March 2008-April 2009
0 1 Pd 090318-K1-2 0.112 1000 112 0.00082963 135 RF 6 5 60.1 134.2 Book 2: Aug 2005- April 2006
0 1 Pd 090527-K1-3 0.0566667 1800 102 0.000566667 100 RF 5 60 Book 8: April 2009-April 2010
0 1 Pd 090615-K1-2 0.0483333 1800 87 0.000483333 100 5 60 134.4 Book 8: April 2009-April 2010
0 1 Pd 090618-K1-3 0.121667 1200 146 0.000869048 140 RF 6 4.99 60.3 134.2 Book 6: March 2008-April 2009
0 1 Pt 050316-K1-1 0.0788889 1800 142 0.000394444 200 RF 4 5 80 131.2 Book 1: June 2004- Aug 2005
0 1 Pt 050317-K1-1 0.0162963 2700 44 0.000162963 100 RF 4 5 80 131.2 Book 1: June 2004- Aug 2005
1 1 Pt 050401-K1-? 0.12 2700 324 0.00048 250 RF 4 5 60 131.2
0 1 Pt 050401-K1-01 0.118481 2700 319.9 0.000473926 250 RF 4 5 80 131.2
0 1 Pt 061026-K1-? 0.12 1942 233.04 0.00048 250 RF 4 5 60 132
0 1 Pt 070419-K1-1 0.04 2400 96 0.0002 200 RF 5 60 Book 4: Jan 2007-July 2007
0 1 Pt 070419-K1-2 0.00444444 2700 12 4.44444e-005 100 RF 5 60 Book 4: Jan 2007-July 2007
0 1 Pt 070419-K1-4 0.045 1000 45 0.000225 200 5 60 Book 1: June 2004- Aug 2005
0 1 Pt 071108-K1-2 0.0523589 7300 382.22 0.000261795 200 RF 4 5 60 136.9 Book 4: Jan 2007-July 2007
0 1 Pt 080515-K1-? 0.024 4500 108 0.00016 150 RF 4 5 60 136.9
0 1 Pt 080519-K1-1 0.089875 2400 215.7 0.0003595 250 RF 4 5 60 136.9 Book 6: March 2008-April 2009
0 1 Pt 080520-K1-? 0.09 2400 216 0.00036 250 RF 4 5 60 136.9
0 1 Pt 090316-K1-1 0.065 1000 65 0.000325 200 RF 4 5.06 60 134.2 Book 6: March 2008-April 2009
0 1 Pt 090316-K1-3 0.041 1000 41 0.000261146 157 RF 4 4.99 60 134.2 Book 6: March 2008-April 2009
0 1 Pt 090318-K1-1 0.014 1000 14 0.00014 100 RF 4 4.99 60 134.2 Book 6: March 2008-April 2009
0 1 Pt 090324-K1-1 0.0668954 2915 195 0.000334477 200 RF 4 5 60 136.9 Book 5: July 2007-March 2008
0 1 Pt 090618-K1-? 0.0708 1200 84.96 0.000354 200 RF 4 5 60 134.2 Book 8: April 2009-April 2010
0 1 Pt 090618-K1-2 0.0708333 1200 85 0.000354167 200 RF 4 4.98 60.1 134.2 Book 8: April 2009-April 2010
0 1 Pt 090625-K1-1 0.0382409 2615 100 0.000764818 50 RF 4 5 60 136.9 Book 8: April 2009-April 2010
0 1 Pt 090629-K1-1 0.0744879 2685 200 0.000372439 200 RF 4 5 60 136.9 Book 8: April 2009-April 2010
0 1 Pt 091009-K1-1 0.0621667 1200 74.6 0.000310833 200 RF 4 5 60 134.2 Book 6: March 2008-April 2009
0 1 Pt 080515-K1-1 0.0244444 4500 110 0.000122222 200 RF 1 5 60 138.9 Book 6: March 2008-April 2009
0 2 Pt 060510-K2-1 0.0265186 4412 117 0.000353581 75 RF? 3 5 80 89
0 2 Pt 051114-K2-1 0.07505 2000 150.1 0.000555926 135 RF 5 80 80
0 2 Pt 060426-K2-1 0.0676692 2527 171 0.000451128 150 RF 3 5 80
0 2 Pt 060511-K2-2 0.0631913 2206 139.4 0.000421275 150 RF 3 5 80 89
1 2 Pt 060801-K2-1 0.07 2206 154.3 0.000466304 150 RF 3 5 60 89
0 2 Pt 070220-K2-1 0.0462778 1800 83.3 0.000308519 150 RF 4 5 60 89
0 2 Pt 070221-K2-2 0.00325397 3780 12.3 6.50794e-005 50 RF 4 5 60 89
0 2 Pt 070221-K2-3 0.0255556 1800 46 0.000255556 100 RF 4 5 60 89
0 2 Pt 070928-K2-1 0.0608341 2206 134.2 0.000405561 150 RF 3 5 80 91.6
0 2 Pt 071011-K2-1 0.00566667 5400 30.6 9.77011e-005 58 RF 3 5 80 88.2
0 2 Pt 081031-K2-1 0.0988214 1103 109 0.000658809 150 RF 2 5 60
0 3 Pt 120812-K3-4 0.125 1000 125 0.000833333 150 DC 2 5 40 25 homogenious center 7.5
0 3 Pt 121115-K3-3 0.1 30 0.00166667 60 DC 1 1 40 25 homogenious center 7.5
0 3 Pt 121116-K3-1 0.288 86.5 0.0016 180 DC 1 40 25 homogenious center 7.5
0 3 Pt 190718-K3-2 0.156 600 94 0.00078 200 DC (DCXS-1500) 3 1 40 25 uniform rotation 100%; on 15 nm Ta 7.5
1 2 Re 110110-K2-1 0.067 2700 183 0.000338889 200 RF 1 20 91.6
0 1 Re 120201-K1-1 0.0664 2500 166 0.000332 200 RF 6 5 60 138.6
0 1 Re 120404-K1-1 0.252 500 126 0.00252 100 DC 1 2 40 Dec 2014 -
0 1 Re 120711-K1-2 0.25 500 125 0.0025 100 DC 1 2 40
0 1 Re 120713-K1-1 0.268 500 134 0.00223333 120 DC 1 2 40
1 1 Re 120730-K1-3 0.353 500 176.3 0.003526 100 DC 3 5 60 Dec. 2011 -
1 1 Ru 150326-K1-1 0.427167 600 256.3 0.0032859 130 DC 3 2 40 134
0 3 Ru 140913-K3-1 0.03 1800 55 0.000428571 70 DC 1 5 40 25 homogenious center 7
0 3 Ru 190718-K3-1 0.177 650 115 0.0007375 240 DCp (10kHz, 5) 1 1 40 25 uniform rotation 100%; on 15 nm Ta 7.5
0 1 Si 120321-K1-2 0.16 3600 589 0.00163611 100 DC (pulse) 3 5 138.9
0 1 Si 120807-K1-1 0.336 1800 605 0.00168 200 pDC 3 5 60 138.9
0 1 Si 140623-K4-1 0.282 1200 338 0.00188 150 DC 1 5 60 134
0 1 Si 140827-K1-1 0.208889 1800 376 0.00224612 93 DC 3 5 60 134
0 1 Si 150601-K1-2 0.3035 2000 607 0.00202333 150 pDC 3 5 60 134
1 1 Si 160307-K1-1 0.07315 2500 182.875 0.001463 50 pDC 3 5 60 134
1 2 Si 061117-K2-1 0.013 900 11.3 0.000125556 100 RF 4 5 60 89
0 2 Si 061120-K2-1 0.029 1800 52.3 0.000145278 200 RF 4 5 60 89
0 2 Si 090529-K2-2 0.013 1500 19 8.44444e-005 150 RF 5 30 80 Ar-Flow-? WorkingDistance-?
0 2 Si 090603-K2-1 0.118593 2700 320.2 0.00047437 250 DC 1 5 60 91.6
0 2 Si 090604-K2-2 0.108127 1415 153 0.000482711 224 DC 1 5 60 91.6
0 2 Si 100408-K2-2 0.104382 1415 147.7 0.000465989 224 DC constant 1 5 60 91.6
0 2 Si 100408-K2-3 0.102191 1415 144.6 0.000456209 224 DC pulse 1 5 60 91.6
0 2 Si 110617-K2-1 0.105 1415 148.2 0.000467567 224 DC constant 1 5 60 91.6
-1000 1 Sm2Co17 060403-K1-1 0.041 3600 147.6 0.000205 200 RF 4 5 60 135
-1000 1 SmCo5 060717-K1-1 0.023 2400 55.2 0.000153333 150 RF 4 5 60 135
-1000 1 SmCo5 060719-K1-1 0.01 6120 61.2 0.0001 100 RF 4 5 60 135 Book aktuell: Jan 2011- now
-1000 1 Superalloy 110315-K1-3 0.648 1800 1166.4 0.00324 200 1 15 100 136.4 Book aktuell: Jan 2011- now
-1000 1 Superalloy 110321-K1-2 0.839 180 151.02 0.00839 100 DC 1 5 60 185 Book aktuell: Jan 2011- now
-1000 1 Superalloy 110407-K1-1 0.0825 1800 148.5 0.0004125 200 RF 4 5 60 136.4 Book aktuell: Jan 2011- now
-1000 1 Superalloy 110408-K1-1 0.198722 1800 357.7 0.000993611 200 RF 4 5 60 185
1 1 Ta 080527-K1-01 0.384 900 345.6 0.00256 150 DC 2 5 60 138.9
0 1 Ta 080527-K1-1 0.383556 900 345.2 0.00255704 150 DC 2 5 60 138.9 Book 6: March 2008-April 2009
0 1 Ta 090323-K1-02 0.18 900 162 0.0024 75 DC 3 5 60 134.4
0 1 Ta 090323-K1-2 0.180222 900 162.2 0.00180222 100 DC 3 5 60 134.4 Book 6: March 2008-April 2009
0 1 Ta 090401-K1-01 0.075 1305 97.875 0.00234375 32 DC 3 5 60 134.4 Book 10: April 2010-Jan 2011
0 1 Ta 090402-K1-1 0.075249 1305 98.2 0.00235153 32 DC 3 5 20 134.4
0 1 Ta 100712-K1-1 0.0941111 3600 338.8 0.000470556 200 RF 6 5 60 134.4 Book 6: March 2008-April 2009
0 1 Ta 120206-K1-1 0.0579167 1800 104.25 0.000231667 250 RF 4 5 60 138.9
0 1 Ta 120206-K1-2 0.0362222 1800 65.2 0.000181111 200 RF 4 5 60 139.8
0 1 Ta 120322-K1-1 0.516389 3600 1859 0.00258194 200 DC 1 5 60 139.8
0 1 Ta 180713-K1-1 0.0580664 2500 145.166 0.000387109 150 RF 6 5 60 141
0 3 Ta 190715-K3-1 0.165 1800 297 0.000825 200 DC (DCXS-750) 4 5 20 25 uniform rotation 100%; resist problems 7.5
0 3 Ta 190717-K3-1 0.167 900 150 0.000835 200 DC (DCXS-750) 4 5 20 25 uniform rotation 100% 7.5
0 2 Ta 071112-K2-1 0.0734259 5400 396.5 0.00036713 200 RF 1 5 60 91.6
0 2 Ta 080328-K2-2 0.0387963 5400 209.5 0.000193981 200 RF 1 5 60 91.6 Cathode tilt: 20mm
1 2 Ta 100907-K2-2 0.0752778 3600 271 0.000376389 200 RF 4 5 60 91.6
0 2 Ta 180216-K2-1 0.035 1800 63 0.000269 130 RF 4 5 60 91.6
1 2 Ti 060120-K2-1 0.039 2326 91 0.000195615 200 DC 5 80 83
0 2 Ti 061012-K2-2 0.081 2128 172.368 0.00054 150 DC 1 1 20 89
0 2 Ti 061218-K2-2 0.029 3850 112.2 0.000145714 200 RF 1 5 60 89
0 2 Ti 070309-K2-1 0.0263333 1500 39.5 0.000131667 200 RF 3 1 20 89 Pd-cap
0 2 Ti 071106-K2-1 0.0276667 1500 41.5 0.000138333 200 RF 3 5 60 91.6 WorkingDistance-?
0 2 Ti 071108-K2-1 0.00126389 7200 9.1 2.52778e-005 50 RF 3 1 20 91.6
0 2 Ti 071113-K2-1 0.127398 5000 636.99 0.00063699 200 DC 3 5 60 91.6
0 2 Ti 080328-K2-1 0.0484 5000 242 0.000242 200 DC constant 3 5 60 91.6 Cathode tilt: 20mm
0 2 Ti 091027-K2-1 0.12 3600 432 0.0006 200 DC constant 4 5 60 91.6 WorkingDistance-?
0 2 Ti 110408-K2-1 0.129653 3600 466.75 0.000648264 200 DC constant 2 20 80 91.6 Way too high?
0 2 Ti 110330-K1-1 0.134 5170 694.2 0.000671373 200 DC constant 2 20 80 91.6
0 1 Ti 090324-K1-? 0.063 1430 90.09 0.00126 50 DC 1 5 60 136.9
0 1 Ti 060608-K1-1 0.29224 1500 438.36 0.0014612 200 DC 5 60 Book 2: Aug 2005- April 2006
0 1 Ti 121005-K1-1 0.027 250 RF 6 5 60 Ti (almost used up); Book 8: April 2009-April 2010
0 3 Ti 120626-K3-2 0.056 100 0.00028 200 DCp (0Hz) 2 20 80 25 uniform 7.5
0 3 Ti 140812-K3-3 0.04333 1800 78 0.000288867 150 DCp (0Hz) 4 10 40 25 uniform 7.5
0 3 Ti 211115-K3-1 0.055 2400 132 0.000366667 150 DCp (10kHz, 5µs) 1 5 30 25 uniform rotation 75% 7.5
1 1 Ti 050224-K1-02 0.32 1800 576 0.0016 200 DC 2 5 60 129.6
0 1 Ti 050224-K1-1 0.333333 1800 600 0.00167504 199 DC 2 4.97 79.9 129.64
0 1 Ti 060117-K1-1 0.0166667 1800 30 0.000111111 150 RF 6 2 20 136 Book 2: Aug 2005- April 2006
0 1 Ti 060118-K1-1 0.047619 630 30 0.000238095 200 RF 6 5 80 129.6 Book 1: June 2004- Aug 2005
0 1 Ti 071023-K1-1 0.07 1875 131.25 0.0014 50 DC 2 5 60 136.9
0 1 Ti 090324-K1-2 0.0632867 1430 90.5 0.00126573 50 DC 1 5 60 136.9 Book 5: July 2007-March 2008
0 1 Ti 090527-K1-? 0.276 1800 496.8 0.00131429 210 DC 1 5 60 134.4
0 1 Ti 090527-K1-2 0.276111 1800 497 0.00131481 210 DC 5 60 Book 8: April 2009-April 2010
0 1 Ti 090615-K1-? 0.292 1800 525.6 0.00139048 210 DC 1 5 60 134.4
0 1 Ti 090615-K1-1 0.292222 1800 526 0.00139153 210 DC 5 60 134.4 Book 6: March 2008-April 2009
0 1 Ti 100907-K1-? 0.039 2700 105.3 0.000195 200 RF 6 5 60 136.9
0 1 Ti 100907-K1-1 0.039 2700 105.3 0.000195 200 RF 6 5 60 136.9 Book 10: April 2010-Jan 2011
0 1 Ti 101102-K1-? 0.053 7200 381.6 0.000212 250 RF 6 5 60 136.9 Book aktuell: Jan 2011- now
0 1 Ti 101102-K1-2 0.0529306 7200 381.1 0.000211722 250 RF 6 5 60 136.9 Book 10: April 2010-Jan 2011
0 1 Ti 101208-K1-1 0.025 400 10 0.000166667 150 DC 6 5 60 136.4 Book 8: April 2009-April 2010
0 1 Ti 110328-K1-1 0.15 1800 270 0.0015 100 DC 3 2 60 134.4 Book 10: April 2010-Jan 2011
0 1 Ti 120724-K1-1 0.28 1800 500 0.00186667 150 DC 1 5 60 138.9
0 1 Ti 121029-K1-1 0.18 500 90 0.0015 120 DC 3 2 40
0 1 Ti 121029-K1-4 0.275 500 138 0.00171875 160 DC 3 2 40 Book: Dec2011 -
0 1 Ti 081031-K1-1 0.326667 1500 490 0.00163333 200 DC 1 5 60 134.4 Book 6: March 2008-April 2009
0 1 Ti 101207-K1-1 0.0527778 1800 95 0.000211111 250 RF 6 5 80 136.4 Book 10: April 2010-Jan 2011
0 2 Ti 150724-K2-1 0.094 1800 169.1 0.000469722 200 DC 3 5 60 91.6
-1000 3 TiOx 130710-K3-1 0.013 3600 47.3 3.25e-005 400 DCp (35kHz, 1.2) 2 2 25 homogenious center; thickness: low 7.5
-1000 3 TiOx 130710-K3-2 0.0119 3600 43 2.975e-005 400 DCp (35kHz, 1.2) 2 5 25 homogenious center; thickness: low 7.5
-1000 3 TiOx 130710-K3-3 0.0097 3600 35 2.425e-005 400 DCp (35kHz, 1.2) 2 10 25 homogenious center; thickness: very low 7.5
-1000 3 TiOx 130711-K3-1 0.0051 3600 18.4 1.275e-005 400 DCp (35kHz, 1.2) 2 20 25 homogenious center; thickness: very low 7.5
-1000 3 TiOx 130711-K3-2 0.0044 3600 15.6 1.1e-005 400 DCp (35kHz, 1.2) 2 30 25 homogenious center; thickness: very low 7.5
-1000 3 TiOx 130725-K3-1 0.0178 3600 64.3 2.96667e-005 600 DCp (35kHz, 1.2) 2 2 25 homogenious center 7.5
-1000 3 TiOx 130725-K3-2 0.0181 3600 65.1 3.01667e-005 600 DCp (35kHz, 1.2) 2 5 25 homogenious center 7.5
-1000 3 TiOx 130726-K3-1 0.0162 3600 58.4 2.7e-005 600 DCp (35kHz, 1.2) 2 10 25 homogenious center 7.5
-1000 3 TiOx 130726-K3-2 0.0073 3600 26.2 1.21667e-005 600 DCp (35kHz, 1.2) 2 20 25 homogenious center 7.5
-1000 3 TiOx 130726-K3-3 0.005 3600 18.1 8.33333e-006 600 DCp (35kHz, 1.2) 2 30 25 homogenious center 7.5
-1000 3 TiOx 131120-K3-4 0.0114 6000 68.5 2.53333e-005 450 RF 2 5 25 homogenious center 7
1 1 V 100412-K1-1 0.23 2700 621 0.00115 200 DC 3 5 60 136.4 Book 8: April 2009-April 2010
0 1 V 100412-K1-2 0.09 1800 162 0.0009 100 DC 3 5 60 136.4
0 2 V 180219-K2-1 0.013 1800 23 0.0001 130 RF 1 5 60 91.6
0 2 V 180221-K2-1 0.084 1800 152 0.000562 150 DC 1 5 60 91.6
0 2 W 090818-K2-1 0.169167 3600 609 0.000966667 175 DC constant 4 5 60 91.6
0 2 W 100108-K2-1 0.0294805 3850 113.5 0.00109187 27 DC 5 5 60 91.6
0 2 W 100914-K2-1 0.190833 3600 687 0.000954167 200 DC constant 5 60 91.6
1 2 W 101018-K2-1 0.190476 840 160 0.000952381 200 DC 5 5 60 91.6
0 2 W 120201-K2-1 0.003472 7200 25 0.000115741 30 RF 2 5 60 91.6
1 1 W 090520-K1-? 0.0569 3600 204.84 0.0002845 200 RF 5 5 60 134.4
0 1 W 090702-K1-? 0.109 3600 392.4 0.000363333 300 RF 5 5 60 134.4 Book 10: April 2010-Jan 2011
0 1 W 090702-K1-2 0.109278 3600 393.4 0.000364259 300 RF 5 5 60 134.4 Book 8: April 2009-April 2010
0 1 W 090728-K1-1 0.109167 3600 393 0.000363889 300 RF 5 5 60 134.4
0 1 W 100714-K1-1 0.09575 3600 344.7 0.000348182 275 RF 5 5 60 134.4 Book 8: April 2009-April 2010
0 1 W 121029-K1-2 0.272 500 136 0.00226667 120 DC 1 2 40 Book 3: April 2006-Jan 2007
0 3 W 110609-K3-1 0.082 220.9 0.00082 100 DCp (0 Hz) 2 5 30 25 7.5
0 3 W 110610-K3-1 0.076 205 0.000304 250 RF 3 5 30 25 7.5
0 3 W 110627-K3-1 0.084 203.9 0.00084 100 DC 5
0 3 W 111118-K3-3 0.158 283.5 0.00105333 150 DC 2 10 40 25 wedge (central point) 7.5
0 3 W 111118-K3-4 0.245 441.5 0.00098 250 DC 2 10 40 25 wedge (central point) 7.5
0 3 W 130703-K3-1 0.082 1800 148 0.00041 200 RF 3 5 40 25 homogenious center 7.5
-1000 3 WOx 130121-K3-1 0.0174 31.3 8.7e-005 200 DCp (35kHz, 1.2) 3 20 40 25 homogenious center 7.5
-1000 3 WOx 130122-K3-2 0.046 82.85 0.000115 400 DCp (35kHz, 1.2) 3 20 40 25 homogenious center 7.5
-1000 3 WOx 130607-K3-1 0.022 3600 80 8.8e-005 250 RF 3 2 25 homogenious center 7.5
-1000 3 WOx 130610-K3-1 0.0261 3600 94 0.0001044 250 RF 3 5 25 homogenious center 7.5
-1000 3 WOx 130610-K3-2 0.0214 3600 76.3 8.56e-005 250 RF 3 10 25 homogenious center 7.5
-1000 3 WOx 130610-K3-3 0.012 3600 42 4.8e-005 250 RF 3 20 25 homogenious center; thickness: low 7.5
-1000 3 WOx 130610-K3-4 0.0081 3600 29 3.24e-005 250 RF 3 30 25 homogenious center; thickness: very low 7.5
1 2 Y 090916-K2-1 0.0733333 1800 132 0.000488889 150 RF 2 5 60 91.6
-1000 3 ZnO 130122-K3-1 100 RF 2 10 40 25 homogenious center 7.5
-1000 3 ZnO 130131-K3-1 0.022 3600 158.9 0.00022 100 RF 2 10 40 25 homogenious center 7.5
1 1 Zr 061229-K1-2 0.0164056 3600 59.06 0.000164056 100 RF 4 5 60 132 Book 3: April 2006-Jan 2007
0 1 Zr 061229-K1-3 0.0521667 3600 187.8 0.000260833 200 RF 4 5 60 132
0 2 Zr 081117-K2-1 0.0658056 3600 236.9 0.000329028 200 RF 4 5 60 91.6
1 2 Zr 091119-K2-1 0.0220556 3600 79.4 0.000220556 100 RF 4 5 60 91.6